Title:
MOISTURE DETECTION SENSOR
Document Type and Number:
WIPO Patent Application WO/2021/193217
Kind Code:
A1
Abstract:
A moisture detection sensor (10) comprises a substrate (20), a porous body (30), an electrode film (41), and an electrode film (42). The substrate (20) has a main surface (201) and a main surface (202), and is provided with a recess (21) recessed from the main surface (202). The porous body (30) is positioned in the recess (21). The electrode film (41) and the electrode film (42) are positioned on the main surface (201) of the substrate (20). The electrode film (41) and the electrode film (42) overlap the porous body (30) as viewed in the direction orthogonal to the main surface (201). The porous body (30) has a shape that does not protrude from the main surface (201) and the main surface (202).
Inventors:
HARA TETSUZO (JP)
ISHII MASAHIRO (JP)
ISHII MASAHIRO (JP)
Application Number:
PCT/JP2021/010498
Publication Date:
September 30, 2021
Filing Date:
March 16, 2021
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
G01N27/22
Foreign References:
| US20150129538A1 | 2015-05-14 | |||
| JP2013057574A | 2013-03-28 | |||
| JP2008151524A | 2008-07-03 | |||
| JP2005201753A | 2005-07-28 | |||
| JP2008107166A | 2008-05-08 |
Attorney, Agent or Firm:
KAEDE PATENT ATTORNEYS' OFFICE (JP)
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