Title:
MOLYBDENUM DISELENIDE/INGAN MULTISPECTRAL PHOTODETECTOR, AND PREPARATION METHOD THEREFOR AND APPLICATION THEREOF
Document Type and Number:
WIPO Patent Application WO/2023/045171
Kind Code:
A1
Abstract:
The present invention relates to the technical field of photodetectors. Disclosed are a molybdenum diselenide/InGaN multispectral photodetector, and a preparation method therefor and an application thereof. The photodetector comprises a substrate, a buffer layer, an InGaN layer, and a MoSe2 layer arranged sequentially from bottom to top, the MoSe2 layer partially covering the InGaN layer; the photodetector further comprises a barrier layer and an electrode layer; the barrier layer is disposed on the InGaN layer not covered by the MoSe2 layer and part of the MoSe2 layer, and the electrode layer is disposed on the barrier layer and covers the exposed part on the part of the MoSe2 layer. Further disclosed in the present invention is a preparation method for the detector. The detector of the present invention achieves simultaneous detection of red light and blue light; the sensitivity-enhancing micro-nano structure design on the surface of a detection chip improves the quantum efficiency of blue light and red light bands, enhances the resonant absorption of the blue light and the red light, and achieves high-sensitivity and high-bandwidth detection. The detector of the present invention is used for multispectral photodetection of the blue light and/or the red light.
Inventors:
LI GUOQIANG (CN)
KONG DEQI (CN)
WANG WENLIANG (CN)
CHEN LIANG (CN)
KONG DEQI (CN)
WANG WENLIANG (CN)
CHEN LIANG (CN)
Application Number:
PCT/CN2021/143373
Publication Date:
March 30, 2023
Filing Date:
December 30, 2021
Export Citation:
Assignee:
UNIV SOUTH CHINA TECH (CN)
International Classes:
H01L31/101; H01L31/0352; H01L31/109; H01L31/18
Foreign References:
| CN110444626A | 2019-11-12 | |||
| CN110581197A | 2019-12-17 | |||
| CN105405915A | 2016-03-16 | |||
| CN108695436A | 2018-10-23 | |||
| CN110690313A | 2020-01-14 |
Attorney, Agent or Firm:
GUANGZHOU HUAXUE INTELLECTUAL PROPERTY AGENCY CO., LTD. (CN)
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