Title:
TITANIUM CARBIDE/INGAN HETEROJUNCTION BLUE-LIGHT DETECTOR AND PREPARATION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2023/045172
Kind Code:
A1
Abstract:
A titanium carbide/InGaN heterojunction blue-light detector and a preparation method therefor. The blue-light detector comprises a substrate (1), a buffer layer (2) and a Ti3C2/InGaN heterojunction functional layer which are successively arranged from bottom to top, wherein the buffer layer (2) is composed of an AlN layer, an AlGaN layer and a GaN layer that are successively arranged from bottom to top, and the AlN layer therein is disposed on the substrate (1); and in the Ti3C2/InGaN heterojunction functional layer, an InGaN layer (3) is disposed on the GaN layer of the buffer layer (2), and a Ti3C2 layer (4) partially covers the InGaN layer (3). The blue-light detector further comprises a metal layer electrode (5), wherein the metal layer electrode (5) is disposed on the Ti3C2 layer (4) and the uncovered InGaN layer (3). The blue-light detector has a high quantum efficiency in a blue light waveband, and enhanced blue light resonance absorption, and also realizes high-sensitivity and high-bandwidth detection.
Inventors:
LI GUOQIANG (CN)
KONG DEQI (CN)
WANG WENLIANG (CN)
CHAI JIXING (CN)
KONG DEQI (CN)
WANG WENLIANG (CN)
CHAI JIXING (CN)
Application Number:
PCT/CN2021/143376
Publication Date:
March 30, 2023
Filing Date:
December 30, 2021
Export Citation:
Assignee:
UNIV SOUTH CHINA TECH (CN)
International Classes:
H01L31/109; H01L31/0224; H01L31/0336; H01L31/0352
Foreign References:
| CN113224198A | 2021-08-06 | |||
| CN110444626A | 2019-11-12 | |||
| CN112234117A | 2021-01-15 |
Other References:
DURM GREGORY, FRENTZAS SOPHIA, RASMUSSEN ERIK, NAJMI SALTANAT, SADRAEI NOOSHIN: "417 Design and rationale of a phase 1 study evaluating AMG 256, a novel, targeted, IL-21 receptor agonist and anti-PD-1 antibody, in patients with advanced solid tumors", REGULAR AND YOUNG INVESTIGATOR AWARD ABSTRACTS, BMJ PUBLISHING GROUP LTD, 1 November 2020 (2020-11-01), pages A254.1 - A254, XP093054553, DOI: 10.1136/jitc-2020-SITC2020.0417
Attorney, Agent or Firm:
GUANGZHOU HUAXUE INTELLECTUAL PROPERTY AGENCY CO., LTD. (CN)
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