Title:
MULTI-STAGE ELECTRIC FIELD DUST REMOVAL METHOD FOR SEMICONDUCTOR MANUFACTURING CLEAN ROOM SYSTEM AND SEMICONDUCTOR MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2020/216353
Kind Code:
A1
Abstract:
A multi-stage electric field dust removal method for a semiconductor manufacturing clean room system and a semiconductor manufacturing method. The multi-stage electric field dust removal method comprises the following steps: causing gas to pass through each electric field device connected in series to a multi-stage electric field dust removal system; applying a voltage to each electric field device, the voltage being sufficient to ensure that the total dust removal efficiency of the electric field dust removal system, (100%-(100%-P1%)*(100%-P2%)*...*(100%-Pn%)), is greater than or equal to a predetermined value, and the ozone output is less than or equal to a predetermined value, wherein P1%, P2%... and Pn% are sequentially the dust removal efficiency of the first-stage, the second-stage, ... and the nth-stage electric field devices, respectively, and n is an integer greater than 1; and inputting the gas subjected to dust removal into a clean room. The method implements the effective removal of particulate matter at a high flow rate, the required electric field devices have a small size and lows costs, and operating electricity costs can be reduced. In addition, the ozone output is controlled within a certain range to satisfy the requirements for a semiconductor manufacturing environment.
Inventors:
TANG WANFU (CN)
ZHAO XIAOYUN (CN)
WANG DAXIANG (CN)
DUAN ZHIJUN (CN)
ZOU YONGAN (CN)
XI YONG (CN)
ZHAO XIAOYUN (CN)
WANG DAXIANG (CN)
DUAN ZHIJUN (CN)
ZOU YONGAN (CN)
XI YONG (CN)
Application Number:
PCT/CN2020/086848
Publication Date:
October 29, 2020
Filing Date:
April 24, 2020
Export Citation:
Assignee:
SHANGHAI BIXIUFU ENTERPRISE MAN CO LTD (CN)
International Classes:
B03C3/40; A61L9/00
Foreign References:
| CN101376034A | 2009-03-04 | |||
| CN109643681A | 2019-04-16 | |||
| CN2269215Y | 1997-12-03 | |||
| CN1520935A | 2004-08-18 | |||
| CN108499739A | 2018-09-07 | |||
| JPH0498034A | 1992-03-30 | |||
| US20150090114A1 | 2015-04-02 |
Attorney, Agent or Firm:
SHANGHAI QIHE INTELLECTUAL PROPERTY AGENCY CO., LTD. (CN)
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