Title:
MULTIPLE BLADE ROBOT ADJUSTMENT APPARATUS AND ASSOCIATED METHOD
Document Type and Number:
WIPO Patent Application WO2002022321
Kind Code:
A3
Abstract:
The present invention provides an apparatus and associated method in which the apparatus comprises a multiple blade robot and a compensating device. The multiple blade robot includes at least one set of robot blades. The compensating device adjusts for differences in spacing between the set of robot blades and spacing between two or more cells. In different embodiments, the compensating device may be coupled to one or more of the process cells, one or more of the substrate holder systems, or one or more of the robot blades.
Inventors:
OLGADO DONALD J K
TEPMAN AVI
FRANKLIN TIMOTHY J
TEPMAN AVI
FRANKLIN TIMOTHY J
Application Number:
PCT/US2001/029004
Publication Date:
December 27, 2002
Filing Date:
September 17, 2001
Export Citation:
Assignee:
APPLIED MATERIALS INC (US)
International Classes:
B25J9/16; C25D7/12; H01L21/00; H01L21/677; H01L21/687; H01L21/288; H05K3/24; (IPC1-7): B25J9/16; H01L21/00
Domestic Patent References:
| WO1999016111A1 | 1999-04-01 |
Foreign References:
| DE3627560A1 | 1988-02-18 | |||
| US5975834A | 1999-11-02 | |||
| US5100502A | 1992-03-31 | |||
| US5382885A | 1995-01-17 | |||
| US5811951A | 1998-09-22 |
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