Title:
NITRIDE-BASED ELECTRONIC DEVICE WITH WAFER-LEVEL DYNAMIC ON-RESISTANCE MONITORING CAPABILITY
Document Type and Number:
WIPO Patent Application WO/2024/040516
Kind Code:
A1
Abstract:
The present disclosure provides a nitride-based electronic device with wafer-level dynamic on-resistance monitoring capability which can be integrated into an integrated circuit chip. The nitride-based electronic device comprises: a control terminal, a first conduction terminal, a second conduction terminal, a voltage-sensing terminal, a power switching element, a sense switching element, a first clamping element and a second clamping element. When the power switching element is turned on by a control signal received by the control terminal, a voltage-sensing signal indicative of an on-state voltage across the first and second conduction terminals of the power switching element is generated at the voltage-sensing terminal. The present invention provides a cost-effective approach to realize wafer-level monitoring of on-resistance of power devices such that development cycle of the power devices can be greatly reduced.
Inventors:
YANG RONG (CN)
YAN HUI (CN)
LI SICHAO (CN)
YAN HUI (CN)
LI SICHAO (CN)
Application Number:
PCT/CN2022/114810
Publication Date:
February 29, 2024
Filing Date:
August 25, 2022
Export Citation:
Assignee:
INNOSCIENCE ZHUHAI TECHNOLOGY CO LTD (CN)
International Classes:
H01L29/778; G01R19/00; G01R27/02; G01R31/327; H01L21/66
Foreign References:
| CN114072909A | 2022-02-18 | |||
| CN114402434A | 2022-04-26 | |||
| CN109565271A | 2019-04-02 | |||
| CN101901805A | 2010-12-01 | |||
| US9152163B1 | 2015-10-06 |
Attorney, Agent or Firm:
BEIJING BESTIPR INTELLECTUAL PROPERTY LAW CORPORATION (CN)
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