OPENING SYSTEM COMPATIBLE WITH A VERTICAL INTERFACE

Title:

OPENING SYSTEM COMPATIBLE WITH A VERTICAL INTERFACE

Document Type and Number:

WIPO Patent Application WO2000002804

Kind Code:

A9

Abstract:

A system is described herein including a load port (24) which allows various pod (32) sizes, including 200 mm and 300 mm, and various configurations, including front opening and bottom opening, to operate with a BOLTS interface (22), or simply with a vertical port on the front end of a process tool in configurations not including the BOLTS interface (22).

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Inventors:

BONORA ANTHONY C
FOSNIGHT WILLIAM J
MARTIN RAYMOND S

Application Number:

PCT/US1999/015691

Publication Date:

July 27, 2000

Filing Date:

July 12, 1999

Export Citation:

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Assignee:

ASYST TECHNOLOGIES (US)

International Classes:

B65G49/07; B65G49/00; H01L21/677; (IPC1-7): B65G49/07

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