Title:
OPTICAL CONSTANT MEASURING DEVICE, METHOD FOR MEASURING OPTICAL CONSTANT, AND METHOD FOR CALCULATING OPTICAL CONSTANT
Document Type and Number:
WIPO Patent Application WO/2021/029435
Kind Code:
A1
Abstract:
A coherent light source 110 outputs coherent light including high order harmonics obtained by shining short pulse laser light onto a nonlinear medium 4. A spectrometer 130 includes a diffraction grating 132 for diffracting the coherent light, and an image sensor 134 for capturing an image of the light that has been diffracted by the diffraction grating 132. A first double slit 150 has a pair of openings that are separated in a first direction, and, in a first state, is disposed in a predetermined position between the coherent light source 110 and an incident slit of the spectrometer 130. A second double slit 152 has a pair of openings replicating the first double slit 150, and, in a second state, is disposed in such a way as to replace the first double slit 150 in the predetermined position, with a sample being held in one of the pair of openings. An arithmetic processing device 200 calculates an optical constant of the sample 2 on the basis of interference images obtained in each of the first state and the second state.
Inventors:
HIRANO DAISUKE (JP)
GONOKAMI MAKOTO (JP)
YOSHIOKA KOSUKE (JP)
GONOKAMI MAKOTO (JP)
YOSHIOKA KOSUKE (JP)
Application Number:
PCT/JP2020/030878
Publication Date:
February 18, 2021
Filing Date:
August 14, 2020
Export Citation:
Assignee:
UNIV TOKYO (JP)
International Classes:
G01N23/02; G01N21/41
Foreign References:
| US20170281102A1 | 2017-10-05 |
Other References:
EIKYUHO, YUKI: "Development of a method for time-resolved phase-sensitive detection of refractive indices using high-order harmonics", THESIS, 23 March 2017 (2017-03-23), pages 1 - 3, XP055902284
CHANG, CHANG: "Direct measurement of index of refraction in the extreme- ultraviolet wavelength region with a novel interferometer", OPTICS LETTERS, vol. 27, no. 12, 15 June 2002 (2002-06-15), pages 1028 - 1030, XP001115231
DEVELOPMENT OF TIME-RESOLVED PHASE-SENSITIVE INDEX MEASUREMENT METHOD USING HIGH-ORDER HARMONICS: "NAGAKUBO, Yuki", DISSERTATION DEPARTMENT OF PHYSICS, GRADUATE SCHOOL OF SCIENCE, UNIVERSITY OF TOKYO, UTOKYO REPOSITORY, 23 March 2017 (2017-03-23), JP, pages 1 - 131,169-176, XP009534712, DOI: 10.15083/00075554
WILSON, LUCY A.: "Double slit interferometry to measure the EUV refractive indices of solids using high harmonics", APPLIED OPTICS, vol. 51, no. 12, 20 April 2012 (2012-04-20), pages 2057 - 2061, XP001574791, DOI: 10.1364/AO.51.002057
W. CHAOJ. KIMS. REKAWAP. FISCHERE. H. ANDERSON, OPT. EXP., vol. 17, 2009, pages 17669
M. GOLDSTEINR. HUDYMAP. NAULLEAUS. WURM, OPT. LETT., vol. 33, 2008, pages 2995
S. BAJTJ. B. ALAMEDAT. W. BARBEEW. M. CLIFTJ. A. FOLTAB. B. KAUFMANNE. A. SPILLER, OPT. ENG., vol. 41, 2002, pages 1797
D. G. STEARNSR. S. ROSENS. P. VERNON, APPL. OPT., vol. 32, 1993, pages 6952
A. K. RAY-CHAUDHURIS. E. GIANOULAKISP. A. SPENCEM. P. KANOUFFC. D. MOEN: "Emerging Lithographic Technologies II", INTERNATIONAL SOCIETY FOR OPTICS AND PHOTONICS, 1998, pages 124 - 133
B. L. HENKEE. M. GULLIKSONJ. C. DAVIS, ATOMIC DATA AND NUCLEAR DATA TABLES, vol. 54, 1993, pages 181
H.-G. BIRKENW. JARKC. KUNZR. WOLF, NUCLEAR INSTRUMENTS AND METHODS IN PHYSICS RESEARCH SECTION A: ACCELERATORS, SPECTROMETERS, DETECTORS AND ASSOCIATED EQUIPMENT, vol. 253, 1986, pages 166
C. CHANGE. ANDERSONP. NAULLEAUE. GULLIKSONK. GOLDBERGD. ATTWOOD, OPT. LETT., vol. 27, 2002, pages 1028
E. M. GULLIKSONP. DENHAMS. MROWKAJ. H. UNDERWOOD, PHYS. REV. B, vol. 49, 1994, pages 16283
D. S. GIANOLAS. VAN PETEGEMM. LEGROSS. BRANDSTETTERH. VAN SWYGENHOVENK. J. HEMKER, ACTA MATERIALIA, vol. 54, 2006, pages 2253
B.-T. CHOUY.-H. CHOUY.-M. WUY.-C. CHUNGW.-J. HSUEHS.-W. LINT.-C. LUT.-R. LINS.-D. LIN, SCIENTIFIC REPORTS, vol. 6, 2016, pages 19887
J. J. MACKLINJ. D. KMETECC. L. GORDON, PHYS. REV. LETT., vol. 70, 1993, pages 1994
P. M. PAULE. S. TOMAP. BREGERG. MULLOTF. AUGEP. BALCOUH. G. MULLERP. AGOSTINI, SCIENCE, vol. 292, 2001, pages 1689
R. A. BARTELSA. PAULH. GREENH. C. KAPTEYNM. M. MURNANES. BACKUSI. P. CHRISTOVY. LIUD. ATTWOODC. JACOBSEN, SCIENCE, vol. 297, 2002, pages 376
C. KAPTEYN, NATURE PHOTONICS, vol. 4, 2010, pages 822
M. R. ALEXANDERG. E. THOMPSONX. ZHOUG. BEAMSONN. FAIRLEY, SURF. INTERFACE ANAL, vol. 34, 2002, pages 485
A. DASR. K. GUPTAM. H. MODIC. MUKHERJEES. K. RAIA. BOSET. GANGULIS. C. JOSHIG. S. LODHAS. K. DEB, APPLIED OPTICS, vol. 51, 2012, pages 7402
R. KEENANC. L. S. LEWISJ. S. WARKE. WOLFRUM, J. PHYS. B: AT. MOL. OPT. PHYS., vol. 35, 2002, pages L447
M. M. BARYSHEVAA. E. PESTOVN. N. SALASHCHENKOM. N. TOROPOVN. I. CHKHALO, PHYS.-USP., vol. 55, 2012, pages 681
Y. LIK. OTAK. MURAKAMI, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B: MICROELECTRONICS AND NANOMETER STRUCTURES PROCESSING, MEASUREMENT, AND PHENOMENA, vol. 21, 2002, pages 127
D. DESCAMPSC. LYNGAJ. NORINA. L'HUILLIERC.-G. WAHLSTROMJ.-F. HERGOTTH. MERDJIP. SALIERESM. BELLINIT. W. HANSCH, OPT. LETT., vol. 25, 2000, pages 135
D. HEMMERSM. BENZIDG. PRETZLER, APPL. PHYS., vol. 108, 2012, pages 167
L. A. WILSONA. K. ROSSALLE. WAGENAARSC. M. CACHOE. SPRINGATEI. C. E. TURCUG. J. TALLENTS, APPL. OPT., vol. 51, 2012, pages 2057
K. A. GOLDBERGR. BEGUIRISTAINJ. BOKORH. MEDECKID. T. ATTWOODK. JACKSONE. TEJNILG. E. SOMMARGREN, JOURNAL OF VACUUM SCIENCE TECHNOLOGY B: MICROELECTRONICS AND NANOMETER STRUCTURES PROCESSING, MEASUREMENT, AND PHENOMENA, vol. 13, 1995, pages 2923
P. MERCEREP. ZEITOUNM. IDIRS. L. PAPED. DOUILLETX. LEVECQG. DOVILLAIRES. BUCOURTK. A. GOLDBERGP. P. NAULLEAU, OPT. LETT., vol. 28, 2003, pages 1534
H. YANC. WANGA. R. MCCARNH. ADE, PHYS. REV. LETT., vol. 110, 2013, pages 177401
D. L. WINDT: "Solar Physics and Space Weather Instrumentation VI", INTERNATIONAL SOCIETY FOR OPTICS AND PHOTONICS, 2015, pages 96040P
G. W. FRASERA. F. ABBEYA. HOLLANDK. MCCARTHYA. OWENSA. WELLS, NUCLEAR INSTRUMENTS AND METHODS IN PHYSICS RESEARCH SECTION A: ACCELERATORS, SPECTROMETERS, DETECTORS AND ASSOCIATED EQUIPMENT, vol. 350, 1994, pages 368
M. TAKEDAH. INAS. KOBAYASHI: "Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry", J. OPT. SOC. AM., vol. 72, no. 1, 1982, pages 156 - 160
A. R. THOMPSONJ. M. MORANG. W. SWENSON: "Interferometry and Synthesis in Radio Astronomy", 2017, SPRINGER INTERNATIONAL PUBLISHING, article "Van Cittert-Zernike Theorem, Spatial Coherence, and Scattering", pages: 767 - 786
E. FRUMKERG. G. PAULUSH. NIIKURAD. M. VILLENEP. B. CORKUM: "Frequency-resolved high-harmonic wavefront characterization", OPT. LETT., vol. 34, no. 19, 2009, pages 3026 - 3028, XP001548619, DOI: 10.1364/ol.34.003026
D. T. LLOYDK. O'KEEFFES. M. HOOKER: "Complete spatial characterization of an optical wavefront using a variable-separation pinhole pair", OPT. LETT., vol. 38, no. 7, 2013, pages 1173 - 1175
J. DOBACZEWSKIW. NAZAREWICZP.-G. REINHARD: "Error estimates of theoretical models: a guide", J. PHYS. G NUCL. PART. PHYS., vol. 41, no. 7, 2014, pages 074001
P. SINERVO, DEFINITION AND TREATMENT OF SYSTEMATIC UNCERTAINTIES IN HIGH ENERGY PHYSICS AND ASTROPHYSICS, 2003
See also references of EP 4016060A4
CHANG, CHANG: "Direct measurement of index of refraction in the extreme- ultraviolet wavelength region with a novel interferometer", OPTICS LETTERS, vol. 27, no. 12, 15 June 2002 (2002-06-15), pages 1028 - 1030, XP001115231
DEVELOPMENT OF TIME-RESOLVED PHASE-SENSITIVE INDEX MEASUREMENT METHOD USING HIGH-ORDER HARMONICS: "NAGAKUBO, Yuki", DISSERTATION DEPARTMENT OF PHYSICS, GRADUATE SCHOOL OF SCIENCE, UNIVERSITY OF TOKYO, UTOKYO REPOSITORY, 23 March 2017 (2017-03-23), JP, pages 1 - 131,169-176, XP009534712, DOI: 10.15083/00075554
WILSON, LUCY A.: "Double slit interferometry to measure the EUV refractive indices of solids using high harmonics", APPLIED OPTICS, vol. 51, no. 12, 20 April 2012 (2012-04-20), pages 2057 - 2061, XP001574791, DOI: 10.1364/AO.51.002057
W. CHAOJ. KIMS. REKAWAP. FISCHERE. H. ANDERSON, OPT. EXP., vol. 17, 2009, pages 17669
M. GOLDSTEINR. HUDYMAP. NAULLEAUS. WURM, OPT. LETT., vol. 33, 2008, pages 2995
S. BAJTJ. B. ALAMEDAT. W. BARBEEW. M. CLIFTJ. A. FOLTAB. B. KAUFMANNE. A. SPILLER, OPT. ENG., vol. 41, 2002, pages 1797
D. G. STEARNSR. S. ROSENS. P. VERNON, APPL. OPT., vol. 32, 1993, pages 6952
A. K. RAY-CHAUDHURIS. E. GIANOULAKISP. A. SPENCEM. P. KANOUFFC. D. MOEN: "Emerging Lithographic Technologies II", INTERNATIONAL SOCIETY FOR OPTICS AND PHOTONICS, 1998, pages 124 - 133
B. L. HENKEE. M. GULLIKSONJ. C. DAVIS, ATOMIC DATA AND NUCLEAR DATA TABLES, vol. 54, 1993, pages 181
H.-G. BIRKENW. JARKC. KUNZR. WOLF, NUCLEAR INSTRUMENTS AND METHODS IN PHYSICS RESEARCH SECTION A: ACCELERATORS, SPECTROMETERS, DETECTORS AND ASSOCIATED EQUIPMENT, vol. 253, 1986, pages 166
C. CHANGE. ANDERSONP. NAULLEAUE. GULLIKSONK. GOLDBERGD. ATTWOOD, OPT. LETT., vol. 27, 2002, pages 1028
E. M. GULLIKSONP. DENHAMS. MROWKAJ. H. UNDERWOOD, PHYS. REV. B, vol. 49, 1994, pages 16283
D. S. GIANOLAS. VAN PETEGEMM. LEGROSS. BRANDSTETTERH. VAN SWYGENHOVENK. J. HEMKER, ACTA MATERIALIA, vol. 54, 2006, pages 2253
B.-T. CHOUY.-H. CHOUY.-M. WUY.-C. CHUNGW.-J. HSUEHS.-W. LINT.-C. LUT.-R. LINS.-D. LIN, SCIENTIFIC REPORTS, vol. 6, 2016, pages 19887
J. J. MACKLINJ. D. KMETECC. L. GORDON, PHYS. REV. LETT., vol. 70, 1993, pages 1994
P. M. PAULE. S. TOMAP. BREGERG. MULLOTF. AUGEP. BALCOUH. G. MULLERP. AGOSTINI, SCIENCE, vol. 292, 2001, pages 1689
R. A. BARTELSA. PAULH. GREENH. C. KAPTEYNM. M. MURNANES. BACKUSI. P. CHRISTOVY. LIUD. ATTWOODC. JACOBSEN, SCIENCE, vol. 297, 2002, pages 376
C. KAPTEYN, NATURE PHOTONICS, vol. 4, 2010, pages 822
M. R. ALEXANDERG. E. THOMPSONX. ZHOUG. BEAMSONN. FAIRLEY, SURF. INTERFACE ANAL, vol. 34, 2002, pages 485
A. DASR. K. GUPTAM. H. MODIC. MUKHERJEES. K. RAIA. BOSET. GANGULIS. C. JOSHIG. S. LODHAS. K. DEB, APPLIED OPTICS, vol. 51, 2012, pages 7402
R. KEENANC. L. S. LEWISJ. S. WARKE. WOLFRUM, J. PHYS. B: AT. MOL. OPT. PHYS., vol. 35, 2002, pages L447
M. M. BARYSHEVAA. E. PESTOVN. N. SALASHCHENKOM. N. TOROPOVN. I. CHKHALO, PHYS.-USP., vol. 55, 2012, pages 681
Y. LIK. OTAK. MURAKAMI, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B: MICROELECTRONICS AND NANOMETER STRUCTURES PROCESSING, MEASUREMENT, AND PHENOMENA, vol. 21, 2002, pages 127
D. DESCAMPSC. LYNGAJ. NORINA. L'HUILLIERC.-G. WAHLSTROMJ.-F. HERGOTTH. MERDJIP. SALIERESM. BELLINIT. W. HANSCH, OPT. LETT., vol. 25, 2000, pages 135
D. HEMMERSM. BENZIDG. PRETZLER, APPL. PHYS., vol. 108, 2012, pages 167
L. A. WILSONA. K. ROSSALLE. WAGENAARSC. M. CACHOE. SPRINGATEI. C. E. TURCUG. J. TALLENTS, APPL. OPT., vol. 51, 2012, pages 2057
K. A. GOLDBERGR. BEGUIRISTAINJ. BOKORH. MEDECKID. T. ATTWOODK. JACKSONE. TEJNILG. E. SOMMARGREN, JOURNAL OF VACUUM SCIENCE TECHNOLOGY B: MICROELECTRONICS AND NANOMETER STRUCTURES PROCESSING, MEASUREMENT, AND PHENOMENA, vol. 13, 1995, pages 2923
P. MERCEREP. ZEITOUNM. IDIRS. L. PAPED. DOUILLETX. LEVECQG. DOVILLAIRES. BUCOURTK. A. GOLDBERGP. P. NAULLEAU, OPT. LETT., vol. 28, 2003, pages 1534
H. YANC. WANGA. R. MCCARNH. ADE, PHYS. REV. LETT., vol. 110, 2013, pages 177401
D. L. WINDT: "Solar Physics and Space Weather Instrumentation VI", INTERNATIONAL SOCIETY FOR OPTICS AND PHOTONICS, 2015, pages 96040P
G. W. FRASERA. F. ABBEYA. HOLLANDK. MCCARTHYA. OWENSA. WELLS, NUCLEAR INSTRUMENTS AND METHODS IN PHYSICS RESEARCH SECTION A: ACCELERATORS, SPECTROMETERS, DETECTORS AND ASSOCIATED EQUIPMENT, vol. 350, 1994, pages 368
M. TAKEDAH. INAS. KOBAYASHI: "Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry", J. OPT. SOC. AM., vol. 72, no. 1, 1982, pages 156 - 160
A. R. THOMPSONJ. M. MORANG. W. SWENSON: "Interferometry and Synthesis in Radio Astronomy", 2017, SPRINGER INTERNATIONAL PUBLISHING, article "Van Cittert-Zernike Theorem, Spatial Coherence, and Scattering", pages: 767 - 786
E. FRUMKERG. G. PAULUSH. NIIKURAD. M. VILLENEP. B. CORKUM: "Frequency-resolved high-harmonic wavefront characterization", OPT. LETT., vol. 34, no. 19, 2009, pages 3026 - 3028, XP001548619, DOI: 10.1364/ol.34.003026
D. T. LLOYDK. O'KEEFFES. M. HOOKER: "Complete spatial characterization of an optical wavefront using a variable-separation pinhole pair", OPT. LETT., vol. 38, no. 7, 2013, pages 1173 - 1175
J. DOBACZEWSKIW. NAZAREWICZP.-G. REINHARD: "Error estimates of theoretical models: a guide", J. PHYS. G NUCL. PART. PHYS., vol. 41, no. 7, 2014, pages 074001
P. SINERVO, DEFINITION AND TREATMENT OF SYSTEMATIC UNCERTAINTIES IN HIGH ENERGY PHYSICS AND ASTROPHYSICS, 2003
See also references of EP 4016060A4
Attorney, Agent or Firm:
MORISHITA Sakaki (JP)
Download PDF: