Title:
OPTICAL ELEMENT AND MACH-ZEHNDER OPTICAL WAVEGUIDE ELEMENT
Document Type and Number:
WIPO Patent Application WO/2013/062096
Kind Code:
A1
Abstract:
An optical element provided with an optical waveguide having a core formed from a rib section, and a first and second slab section positioned flanking the rib section on either side thereof and being thinner than the rib section, wherein: the rib section and the first and second slab sections of the core are integrally formed by semiconductor monocrystallization; the first slab has a p-type-doped p-type region; the second slab has an n-type-doped n-type region; the rib section has a p-type region in contact with the p-type region provided in the first slab section, and an n-type region in contact with the n-type region provided in the second slab section; the p-type region and n-type region are in contact with each other so as to form a p-n junction; the rib section has, in a cross-section perpendicular to the longitudinal direction of the optical waveguide, an upper end located above the first and second slab section; and the upper end of the rib section has an undoped region formed from an intrinsic region or a low-concentration doping region doped at a dopant concentration of 1/10 or less of the concentrations of the adjoining p-type region or n-type region.
Inventors:
GOI KAZUHIRO (JP)
OGAWA KENSUKE (JP)
OGAWA KENSUKE (JP)
Application Number:
PCT/JP2012/077761
Publication Date:
May 02, 2013
Filing Date:
October 26, 2012
Export Citation:
Assignee:
FUJIKURA LTD (JP)
International Classes:
G02F1/025; G02B6/122
Foreign References:
| JP2006515082A | 2006-05-18 | |||
| JP2013003236A | 2013-01-07 |
Other References:
KAZUHIRO GOI ET AL.: "10 dB Extinction Ratio 10 Gbps Silicon Mach-Zehnder Modulator", NEN IEICE ELECTRONICS SOCIETY CONFERENCE, 20 September 2011 (2011-09-20), pages 170
OGAWA K. ET AL.: "Silicon Mach-Zehnder Modulator of Extinction Ratio beyond 10dB at 10.0-12.5 Gbps", ECOC'2011 TECNICAL DIGEST, 19 September 2011 (2011-09-19), pages 1 - 3
THOMSON D. J. ET AL.: "High speed silicon optical modulator with self aligned fabrication process", OPTICS EXPRESS, vol. 18, no. 18, 27 August 2010 (2010-08-27), pages 19064 - 19069
OGAWA K. ET AL.: "Silicon Mach-Zehnder Modulator of Extinction Ratio beyond 10dB at 10.0-12.5 Gbps", ECOC'2011 TECNICAL DIGEST, 19 September 2011 (2011-09-19), pages 1 - 3
THOMSON D. J. ET AL.: "High speed silicon optical modulator with self aligned fabrication process", OPTICS EXPRESS, vol. 18, no. 18, 27 August 2010 (2010-08-27), pages 19064 - 19069
Attorney, Agent or Firm:
SHIGA Masatake et al. (JP)
Masatake Shiga (JP)
Masatake Shiga (JP)
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Claims: