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Title:
OPTICAL SCANNING DEVICE AND METHOD FOR DRIVING MICROMIRROR DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/163501
Kind Code:
A1
Abstract:
An optical scanning device according to the present invention comprises a micromirror device and a processor. The micromirror device comprises: a mirror part having a reflecting surface that reflects incident light; a first actuator that swings the mirror part around a first axis in a plane including the reflecting surface when the mirror part is stationary; and a second actuator that swings the mirror part around a second axis orthogonal to the first axis in the plane. The processor causes precession of the mirror part by applying a first drive signal and a second drive signal, each having the same drive frequency, to the first actuator and the second actuator. When the resonance frequency around the first axis is denoted by f1 and the resonance frequency around the second axis is denoted by f2, the micromirror device satisfies a relationship of f2 < f1, and when the drive frequency is denoted by fd, the micromirror device satisfies a relationship of fd ≤ f1.

Inventors:
NISHIURA YOSUKE (JP)
NAONO TAKAYUKI (JP)
AOSHIMA KEISUKE (JP)
Application Number:
PCT/JP2022/002053
Publication Date:
August 04, 2022
Filing Date:
January 20, 2022
Export Citation:
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Assignee:
FUJIFILM CORP (JP)
International Classes:
G02B26/10; B81B3/00; G01S7/481; G02B26/08
Domestic Patent References:
WO2018230065A12018-12-20
WO2020085063A12020-04-30
WO2018230065A12018-12-20
Foreign References:
JP2009223165A2009-10-01
JP2012203079A2012-10-22
KR20180110400A2018-10-10
JP2019144497A2019-08-29
Attorney, Agent or Firm:
TAIYO, NAKAJIMA & KATO (JP)
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