Title:
OPTICAL SEMICONDUCTOR ARRAY AND METHOD FOR PRODUCING OPTICAL SEMICONDUCTOR ARRAY
Document Type and Number:
WIPO Patent Application WO/2021/260841
Kind Code:
A1
Abstract:
[Problem] To provide: an optical semiconductor array which has an enlarged effective area; and a method for producing this optical semiconductor array. [Solution] An optical semiconductor array (1A) which comprises a plurality of mesa optical semiconductor elements (11a to 11d) on a semiconductor substrate (10), said optical semiconductor elements being separated from each other by groove parts (12a, 12b); and each of the plurality of optical semiconductor elements (11a to 11d) is provided with a semiconductor multilayer part (20) that comprises a first semiconductor layer (20a) which is in contact with the semiconductor substrate (10), and a contact hole (21a to 21d) that is formed in a portion of the semiconductor multilayer part (20) so as to extend from the surface of the semiconductor multilayer part (20) to the first semiconductor layer (20a), said portion being at a distance from the groove parts (12a, 12b).
Inventors:
SATOH TAKEHITO (JP)
Application Number:
PCT/JP2020/024809
Publication Date:
December 30, 2021
Filing Date:
June 24, 2020
Export Citation:
Assignee:
KYOTO SEMICONDUCTOR CO LTD (JP)
International Classes:
H01L31/10
Foreign References:
| JP2014165224A | 2014-09-08 | |||
| JPH0237746A | 1990-02-07 | |||
| JP2011258691A | 2011-12-22 | |||
| JP2001144278A | 2001-05-25 | |||
| JP2003249675A | 2003-09-05 | |||
| US20140319642A1 | 2014-10-30 |
Attorney, Agent or Firm:
OKAMURA Toshio (JP)
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