Title:
ORGANIC SEMICONDUCTOR FILM PRODUCTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/134991
Kind Code:
A1
Abstract:
An organic semiconductor film production device for producing an organic semiconductor film by using an organic semiconductor solution, the production device having: a coating member that is positioned so as to face the surface of a substrate on which the organic semiconductor film is to be formed at a distance therefrom, and forms a liquid pool of the organic semiconductor solution between the substrate and the coating member itself; a supply unit for supplying the organic semiconductor solution between the substrate and the coating member; and a cover unit for covering at least the crystal growth section of the organic semiconductor solution. The cover unit is equipped with a guide to which a solvent of the vaporized organic semiconductor solution adheres, and which guides the adhered substance formed from the solvent of the vaporized organic semiconductor solution to a region where the organic semiconductor film has not yet been deposited. The production device supplies the organic semiconductor solution between the substrate surface and the coating member by using the supply unit, and while doing so, moves the coating member in a first direction parallel to the substrate surface while the coating member contacts the organic semiconductor solution, and forms the organic semiconductor film with the crystal growth section as the starting point.
Inventors:
NAKAMURA SEIGO (JP)
MAEHARA YOSHIKI (JP)
ITAI YUICHIRO (JP)
USAMI YOSHIHISA (JP)
TAKEYA JUNICHI (JP)
MAEHARA YOSHIKI (JP)
ITAI YUICHIRO (JP)
USAMI YOSHIHISA (JP)
TAKEYA JUNICHI (JP)
Application Number:
PCT/JP2017/000594
Publication Date:
August 10, 2017
Filing Date:
January 11, 2017
Export Citation:
Assignee:
FUJIFILM CORP (JP)
UNIV TOKYO (JP)
UNIV TOKYO (JP)
International Classes:
H01L21/368; H01L21/336; H01L29/786; H01L51/05; H01L51/40
Domestic Patent References:
| WO2014141838A1 | 2014-09-18 | |||
| WO2012026333A1 | 2012-03-01 |
Foreign References:
| JP2013077799A | 2013-04-25 |
Other References:
See also references of EP 3413338A4
Attorney, Agent or Firm:
WATANABE Mochitoshi et al. (JP)
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