Title:
ORGANIC SEMICONDUCTOR THIN FILM, TRANSISTOR, MANUFACTURING METHOD FOR ORGANIC SEMICONDUCTOR THIN FILM, MANUFACTURING METHOD FOR TRANSISTOR, AND MANUFACTURING METHOD FOR ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/244847
Kind Code:
A1
Abstract:
An organic semiconductor thin film comprising a liquid crystalline organic semiconductor, wherein Qp and Qt measured by a predetermined method satisfy a predetermined requirement (1), and a rocking scan pattern has a ratio Ipeak/Ibas, which is a ratio of the peak intensity of a maximum peak Ipeak with respect to a base line value Ibas, of less than 10. (1): 0.06 ≤ Qp / Qt ≤ 0.5
Inventors:
HANNA JUN-ICHI (JP)
WU HAO (JP)
IINO HIROAKI (JP)
WU HAO (JP)
IINO HIROAKI (JP)
Application Number:
PCT/JP2022/020853
Publication Date:
November 24, 2022
Filing Date:
May 19, 2022
Export Citation:
Assignee:
TOKYO INST TECH (JP)
NIKON CORP (JP)
NIKON CORP (JP)
International Classes:
H01L51/40; H01L21/336; H01L29/786; H01L51/05; H01L51/30
Foreign References:
| JP2004335492A | 2004-11-25 | |||
| US20150060800A1 | 2015-03-05 | |||
| JP2006332249A | 2006-12-07 |
Other References:
TECH TOKYO, KONDO ○ KOICHIRO, HANNA JUN-ICHI, IINO HIROAKI: "Fast speed fabrication of patterned organic semiconductor films by blade-coating using liquid crystalline organic semiconductor and their transistor characteristics ", THE 68TH JSAP SPRING MEETING, 26 February 2021 (2021-02-26), XP093007512, [retrieved on 20221213]
WU HAO, IINO HIROAKI, HANNA JUN-ICHI: "Scalable Ultrahigh-Speed Fabrication of Uniform Polycrystalline Thin Films for Organic Transistors", APPLIED MATERIALS & INTERFACES, AMERICAN CHEMICAL SOCIETY, US, US , XP093007514, ISSN: 1944-8244, DOI: 10.1021/acsami.0c05105
WU HAO, IINO HIROAKI, HANNA JUN-ICHI: "Scalable Ultrahigh-Speed Fabrication of Uniform Polycrystalline Thin Films for Organic Transistors", APPLIED MATERIALS & INTERFACES, AMERICAN CHEMICAL SOCIETY, US, US , XP093007514, ISSN: 1944-8244, DOI: 10.1021/acsami.0c05105
Attorney, Agent or Firm:
NISHIZAWA Kazuyoshi et al. (JP)
Download PDF:
Previous Patent: COMPOSITION FOR REGULATING CELL PROLIFERATION AND REGULATION METHOD OF CELL PROLIFERATION
Next Patent: HEAT STORAGE COMPOSITION
Next Patent: HEAT STORAGE COMPOSITION