Title:
OXIME DERIVATIVES AND THE USE THEREOF AS LATENT ACIDS
Document Type and Number:
WIPO Patent Application WO2002025376
Kind Code:
A3
Abstract:
New oxime sulfonate compounds of formula (I, II, III, IV, V, VI and VII) wherein R1 is for example C1-C18 alkylsulfonyl, R2 is halogen or C1-C10 haloalkyl; R3 is for example unsubstituted or substituted phenylenedisulfonyl, diphenylenedisulfonyl, or oxydiphenylenedisulfonyl; Ar1 is for example a direct bond, C1-C12 alkylene; -O-C-bond or a O-Si-bond which cleaves upon the action of an acid; A1, A2, A3, A4, A5, A6, A7, A8, A9, A10, A11 and A12 are for example a direct bond, -O-, or S-, or are C1-C12 alkylene or phenylene unsubstituted or substituted; Y1 is C1-C12 alkylene which is for example subsituted by OR4, or SR7; Y2 is e.g. a trivalent radical of C1-C12 alkylene; Y3 is e.g. a tetravalent radical of C1-C12 alkylene; X is halogen; Ar'1 is for example C1-C12 alkyl which is unsubstituted or substituted; Ar"1 is for example phenylene; provided that at least one of the radicals Ar'1, Ar"1, is substituted by 1 to 3 groups of (VIII), (IX), (X), (XI), (XII) and/or (XIII); M<+> is e.g. (XIV); L<-> is for example halogen; R15, R16, R17 and R18 are e.g. hydrogen or phenyl; R19, R20, R21, R22 and R23 are e.g. phenyl; are especially suitable for the preparation of photoresists.
Inventors:
YAMATO HITOSHI (JP)
ASAKURA TOSHIKAGE (JP)
MATSUMOTO AKIRA (JP)
OHWA MASAKI (JP)
ASAKURA TOSHIKAGE (JP)
MATSUMOTO AKIRA (JP)
OHWA MASAKI (JP)
Application Number:
PCT/EP2001/010784
Publication Date:
March 13, 2003
Filing Date:
September 18, 2001
Export Citation:
Assignee:
CIBA SC HOLDING AG (CH)
YAMATO HITOSHI (JP)
ASAKURA TOSHIKAGE (JP)
MATSUMOTO AKIRA (JP)
OHWA MASAKI (JP)
YAMATO HITOSHI (JP)
ASAKURA TOSHIKAGE (JP)
MATSUMOTO AKIRA (JP)
OHWA MASAKI (JP)
International Classes:
C07C309/63; G03F7/004; G03F7/038; G03F7/039; H01L21/027; (IPC1-7): G03F7/004; G03F7/038; G03F7/039; C07C309/63
Foreign References:
| US4540598A | 1985-09-10 | |||
| US4736055A | 1988-04-05 |
Other References:
M. PLATZ ET AL.: "Photolysis of 3-Aryl-3-(trifluoromethyl)diazirines: A Caveat Regarding Their Use in Photoaffinity Probes", BIOCONJUGATE CHEMISTRY, vol. 2, no. 5, 1991, Washington, DC, US, pages 337 - 341, XP002113444
J.M. DELFINO ET AL.: "Design, Synthesis, and Properties of a Photoactivatable Membrane-Spanning Phospholipidic Probe", JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, vol. 115, 1993, Washington, DC, US, pages 3458 - 3474, XP002113445
J.M. DELFINO ET AL.: "Design, Synthesis, and Properties of a Photoactivatable Membrane-Spanning Phospholipidic Probe", JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, vol. 115, 1993, Washington, DC, US, pages 3458 - 3474, XP002113445
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