Title:
OZONE GAS SUPPLY SYSTEM
Document Type and Number:
WIPO Patent Application WO/2024/009699
Kind Code:
A1
Abstract:
An ozone gas supply system 1 comprises: a buffer tank 40 that temporarily stores and supplies, to an ozone gas utilization system 3, a highly concentrated ozone gas supplied from ozone vessels 20 of an ozone gas supply unit 2 and having an ozone concentration of 80% or higher; and a control unit 24 that detects, on the basis of a relationship between temperature and pressure of the ozone gas at an ozone concentration of 100% and an ozone concentration of less than 100%, a decrease in the ozone concentration in the buffer tank 40 from a pressure value at a prescribed temperature of the ozone vessels 20 communicating with the buffer tank 40. When a decrease in the ozone concentration is detected, gas inside gas supply piping 41 coupling the buffer tank 40 and the ozone vessels 20 and inside the buffer tank 40 is discharged outside the system, and subsequently the highly concentrated ozone gas is supplied from the ozone vessels 20 to the buffer tank 40.
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Inventors:
NISHIGUCHI TETSUYA (JP)
MORIKAWA YOSHIKI (JP)
YAMASHITA HIROAKI (JP)
MORIKAWA YOSHIKI (JP)
YAMASHITA HIROAKI (JP)
Application Number:
PCT/JP2023/021827
Publication Date:
January 11, 2024
Filing Date:
June 13, 2023
Export Citation:
Assignee:
MEIDEN NANOPROCESS INNOVATIONS INC (JP)
International Classes:
C01B13/11; C23C16/455
Domestic Patent References:
| WO2009069774A1 | 2009-06-04 |
Foreign References:
| JP2010222168A | 2010-10-07 | |||
| US20200384142A1 | 2020-12-10 | |||
| JP2014189407A | 2014-10-06 | |||
| JP2009018969A | 2009-01-29 | |||
| JP2010223478A | 2010-10-07 | |||
| JP2002249304A | 2002-09-06 |
Attorney, Agent or Firm:
KOBAYASHI, Hiromichi et al. (JP)
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