Title:
OZONE GENERATING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2015/121939
Kind Code:
A1
Abstract:
The purpose of the present invention is to improve conduction reliability of a high-voltage electrode in an ozone generating apparatus. This ozone generating apparatus is provided with: a housing having a starting material gas chamber into which a starting material gas flows, and an ozone gas chamber out of which an ozonized gas flows; a grounding electrode, which is disposed on the inner side of the housing, and which has a cylindrical cavity inside; a glass tube, which has one end sealed, and has a solder film formed on the inner surface thereof; and a high frequency power supply that supplies potential to the solder film via a power supply line. The glass tube is disposed concentrically with the cavity of the grounding electrode, and the solder film is formed containing a rare-earth element.
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Inventors:
NAGAYAMA TAKAHISA (JP)
NAKATANI HAJIME (JP)
ODAI YOSHIAKI (JP)
KURAHASHI KAZUTOSHI (JP)
TAKAUCHI DAISUKE (JP)
NAKATANI HAJIME (JP)
ODAI YOSHIAKI (JP)
KURAHASHI KAZUTOSHI (JP)
TAKAUCHI DAISUKE (JP)
Application Number:
PCT/JP2014/053288
Publication Date:
August 20, 2015
Filing Date:
February 13, 2014
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP (JP)
International Classes:
C01B13/11
Foreign References:
| JP2010269949A | 2010-12-02 | |||
| JP2001047276A | 2001-02-20 | |||
| JPS5524720A | 1980-02-22 |
Attorney, Agent or Firm:
OIWA Masuo et al. (JP)
Masuo Oiwa (JP)
Masuo Oiwa (JP)
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