PHASE MODULATION DEVICE AND LASER MICROSCOPE

Title:

PHASE MODULATION DEVICE AND LASER MICROSCOPE

Document Type and Number:

WIPO Patent Application WO/2016/047225

Kind Code:

A1

Abstract:

A phase modulation device 3 has a first phase modulation element 11 that modulates the phase of a light beam according to a voltage applied to each of a plurality of first electrodes formed so as to apply, to the light beam, an amount of phase modulation having inverted polarity of a phase distribution according to a first ratio of a second aberration component to a first aberration component of wavefront aberration arising from an optical system including an objective lens 4, a second phase modulation element 12 that modulates the phase of the light beam according to a voltage applied to each of a plurality of second electrodes formed so as to apply, to the light beam, an amount of phase modulation having inverted polarity of a phase distribution according to a second ratio of the second aberration component to the first aberration component, and a control circuit 13 that controls the voltages applied to the plurality of first electrodes and the plurality of second electrodes according to a distance from the objective lens to a light-collecting position of the light beam.

Inventors:

TANABE AYANO (JP)

Application Number:

PCT/JP2015/067914

Publication Date:

March 31, 2016

Filing Date:

June 22, 2015

Export Citation:

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Assignee:

CITIZEN HOLDINGS CO LTD (JP)

International Classes:

G02B21/06; G02F1/01; G02F1/13

Domestic Patent References:

WO2014027694A1	2014-02-20
WO2012124634A1	2012-09-20
WO2013172085A1	2013-11-21
WO2013115383A1	2013-08-08
WO2005117003A1	2005-12-08

Foreign References:

JP2003067966A	2003-03-07
JPH11101942A	1999-04-13

Other References: