Title:
PHYSICAL QUANTITY SENSOR AND METHOD FOR MANUFACTURING PHYSICAL QUANTITY SENSOR
Document Type and Number:
WIPO Patent Application WO/2013/118843
Kind Code:
A1
Abstract:
A pressure sensor (100) is provided with: a socket part (1) and a nut part (2) which are formed by being integrally molded with resin; a screw part (6) which is hermetically affixed to the opening sidewall (4) of a recessed section (3) of the nut part (2) by an adhesive (5); and a sensing element (7) which is affixed to the screw part (6) and disposed in the recessed section (3) of the nut part (2). A package (8) is configured from the socket part (1), the nut part (2), and the screw part (6). In the screw part (6), a through-hole (9) for guiding a fluid the pressure of which is to be measured is formed. An external lead-out terminal (10) is affixed to the sensing element (7). The external lead-out terminal (10) is passed through a through-hole (11) in the bottom (3a) of the recessed section (3) of the nut part (2) and hermetically affixed to the socket part (1) by an adhesive (12). The external lead-out terminal (10) is a connection terminal for connecting with external wiring.
Inventors:
ASHINO KIMIHIRO (JP)
Application Number:
PCT/JP2013/052948
Publication Date:
August 15, 2013
Filing Date:
February 07, 2013
Export Citation:
Assignee:
FUJI ELECTRIC CO LTD (JP)
International Classes:
G01L19/14; G01L19/00; G01P15/08
Foreign References:
| JP2006215029A | 2006-08-17 | |||
| JP2004205514A | 2004-07-22 | |||
| JP2006145468A | 2006-06-08 | |||
| JPH11507135A | 1999-06-22 | |||
| JPS63298129A | 1988-12-05 | |||
| JPH09243655A | 1997-09-19 | |||
| JPH09178595A | 1997-07-11 |
Other References:
See also references of EP 2813831A4
Attorney, Agent or Firm:
SAKAI, AKINORI (JP)
Akinori Sakai (JP)
Akinori Sakai (JP)
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Claims: