Title:
PIEZOELECTRIC ELEMENT AND METHOD FOR MANUFACTURING PIEZOELECTRIC ELEMENT
Document Type and Number:
WIPO Patent Application WO/2022/209716
Kind Code:
A1
Abstract:
Provided are a piezoelectric element (1) and a method for manufacturing a piezoelectric element with which it is possible to achieve high breakdown voltage and drive stability without a decrease in piezoelectric characteristics. The piezoelectric element comprises a substrate (11) on which a lower electrode layer (12), a piezoelectric film (15) based on a perovskite type oxide, and an upper electrode layer (18) are provided in this order. The upper electrode layer includes an oxide conductive layer. An interface layer (16) including a constituent element of the oxide conductive layer and an OH group is provided between the piezoelectric film and the oxide conductive layer (18a). The interface layer has an amorphous structure and a thickness of 1 nm to 5 nm inclusive. In an intensity profile of bonding energy in the interface layer acquired by X-ray photoelectron spectroscopic measurement, if the peak intensity of the bonding energy deriving from the 1s orbital of oxygen bound to a metal is α, and the peak intensity of bonding energy deriving from the 1s orbital of oxygen forming an OH group is γ, the peak intensity ratio γ/α is greater than or equal to 0.35.
Inventors:
KOBAYASHI HIROYUKI (JP)
NAKAMURA SEIGO (JP)
MOCHIZUKI FUMIHIKO (JP)
TANAKA HIDEAKI (JP)
INOUE KENICHIRO (JP)
TOYOSHIMA YASUSHI (JP)
NAKAMURA SEIGO (JP)
MOCHIZUKI FUMIHIKO (JP)
TANAKA HIDEAKI (JP)
INOUE KENICHIRO (JP)
TOYOSHIMA YASUSHI (JP)
Application Number:
PCT/JP2022/010719
Publication Date:
October 06, 2022
Filing Date:
March 10, 2022
Export Citation:
Assignee:
FUJIFILM CORP (JP)
International Classes:
H01L41/187; C01G25/00; C23C14/08; C23C14/34; H01L41/047; H01L41/29; H01L41/316; H01L41/39
Foreign References:
| JP2013197496A | 2013-09-30 | |||
| JP2013197553A | 2013-09-30 | |||
| JP2020092228A | 2020-06-11 | |||
| JP2020204083A | 2020-12-24 | |||
| JP2010235402A | 2010-10-21 | |||
| JP2019052348A | 2019-04-04 | |||
| JP2021058185A | 2021-04-15 |
Attorney, Agent or Firm:
TAIYO, NAKAJIMA & KATO (JP)
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