Title:
PIEZOELECTRIC ELEMENT AND METHOD FOR MANUFACTURING PIEZOELECTRIC ELEMENT
Document Type and Number:
WIPO Patent Application WO/2022/209717
Kind Code:
A1
Abstract:
Provided are: an inexpensive piezoelectric element (1), in which the deterioration of piezoelectric characteristics is suppressed; and a method for manufacturing a piezoelectric element. The piezoelectric element comprises, in the following order on a substrate (11): a lower electrode layer (12); a piezoelectric film (15) mainly composed of a perovskite oxide; and an upper electrode layer (18), wherein at least a region, closest to the piezoelectric film side, of the upper electrode layer is composed of an oxide conductive layer (18a) containing In, and in the intensity profile of the bonding energy as measured by X-ray photoelectron spectrometry, for an interface region between the piezoelectric film and the oxide conductive layer of the upper electrode layer, when a peak intensity of a bonding energy derived from the 3d5/2 orbit of In bonded to oxygen is α, and a peak intensity of a bonding energy derived from the 3d5/2 orbit of In bonded to a OH group is γ, the peak intensity ratio satisfies γ/α ≦ 0.25.
Inventors:
MOCHIZUKI FUMIHIKO (JP)
NAKAMURA SEIGO (JP)
KOBAYASHI HIROYUKI (JP)
NAKAMURA SEIGO (JP)
KOBAYASHI HIROYUKI (JP)
Application Number:
PCT/JP2022/010720
Publication Date:
October 06, 2022
Filing Date:
March 10, 2022
Export Citation:
Assignee:
FUJIFILM CORP (JP)
International Classes:
H01L41/187; C23C14/08; C23C14/34; H01L41/047; H01L41/29; H01L41/316; H01L41/39
Foreign References:
| JP2013197496A | 2013-09-30 | |||
| JP2013197553A | 2013-09-30 | |||
| JP2020092228A | 2020-06-11 | |||
| JP2006086223A | 2006-03-30 | |||
| JP2013197496A | 2013-09-30 | |||
| JP2021058186A | 2021-04-15 |
Attorney, Agent or Firm:
TAIYO, NAKAJIMA & KATO (JP)
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