PIEZOELECTRIC VIBRATION DEVICE

Title:

PIEZOELECTRIC VIBRATION DEVICE

Document Type and Number:

WIPO Patent Application WO/2016/136283

Kind Code:

A1

Abstract:

[Problem] To improve reliability while also ensuring airtightness of an interior space where a vibration section of a piezoelectric diaphragm is sealed off, in a piezoelectric vibration device of a sandwich structure. [Solution] Provided to a crystal oscillator 101 are a crystal diaphragm 2, a first sealing member 3 covering a first excitation electrode 221 of the crystal diaphragm 2, and a second sealing member 4 covering a second excitation electrode 222 of the crystal diaphragm 2. A third through hole 269 penetrating through one main surface 211 and another main surface 212 is formed in the crystal diaphragm 2, and a through electrode 71 of the third through hole 269 is electrically conductive with the first excitation electrode 221. A seventh through hole 350 penetrating between one main surface 311 and another main surface 312 is formed in the first sealing member 3. The through electrode 71 of the third through hole 269 and the through electrode 71 of the seventh through hole 350 are electrically conductive with each other, and the third through hole 269 and the seventh through hole 350 are arranged so as not to overlap as seen in plan view.

Inventors:

KOJO TAKUYA (JP)
ISHINO SATORU (JP)

Application Number:

PCT/JP2016/050263

Publication Date:

September 01, 2016

Filing Date:

January 06, 2016

Export Citation:

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Assignee:

DAISHINKU CORP (JP)

International Classes:

H03H9/02

Foreign References:

JP2009260845A	2009-11-05
JP2008182665A	2008-08-07
JP2010147824A	2010-07-01
JP2008178071A	2008-07-31
JP2009010864A	2009-01-15
JP2013157831A	2013-08-15

Other References: