Title:
PRESSURE CONTROL DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/136282
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a pressure control device which is capable of maintaining a constant pressure within a chamber even if the volume of the chamber with respect to controlled flow of a gas is large, or a pipe between a flow control valve and the chamber is long. Provided is a pressure control device 1 which maintains the pressure within a chamber 3 at a set pressure, comprising: a frequency characteristic correction circuit 20 which corrects a pressure signal, which represents the pressure within the chamber 3 which is detected by a pressure sensor 4, such that the pressure signal approaches a set pressure signal which represents the set pressure; a comparison circuit 21 which compares the corrected pressure signal with the set pressure signal; and a valve drive circuit 22 which controls the opening and closing of a flow control valve 24 on the basis of the result of the comparison from the comparison means 21. The frequency characteristic correction circuit 20 is a filter circuit, the frequency characteristic whereof having a peak at a prescribed frequency, and corrects the pressure signal so as to raise a prescribed frequency component of the pressure signal.
Inventors:
NOZAWA TAKAHIRO (JP)
NAKAMURA TAKESHI (JP)
NAKAMURA TAKESHI (JP)
Application Number:
PCT/JP2016/050253
Publication Date:
September 01, 2016
Filing Date:
January 06, 2016
Export Citation:
Assignee:
FUJIKIN KK (JP)
International Classes:
G05D16/20; G05B11/36
Foreign References:
| JP2006528765A | 2006-12-21 | |||
| JP4298025B2 | 2009-07-15 |
Attorney, Agent or Firm:
WILLFORT INTERNATIONAL PATENT FIRM (JP)
Patent business corporation Wil photograph international patent firm (JP)
Patent business corporation Wil photograph international patent firm (JP)
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