PLANAR HEATER - COVALENT MATERIALS CORP

Title:

PLANAR HEATER

Document Type and Number:

WIPO Patent Application WO/2007/097193

Kind Code:

A1

Abstract:

Provided is a planar heater having a substantially uniform heating temperature with a carbon wire heat generating body. The inner region and the outer region have different in-plane arrangement densities of carbon wire heat generating bodies (CW). A power supply terminal section having a connecting line for carrying electricity to a heat generating body (CW) is arranged at the center portion on the rear side of a silica glass board-like body. The connecting wire of the inner carbon wire heat generating body is connected at the center portion of the silica glass board-like body, the connecting lines (3a, 3b) of the outer carbon wire heat generating body are extended to the outer regions from the center portion of the silica glass board-like body, without crossing the inner carbon wire heat generating body (CW), and are connected with the outer carbon wire heat generating body (CW).

Inventors:

SHIBATA KAZUO (JP)
KAWASAKI HIROO (JP)
IWATA TERUO (JP)
AMIKURA MANABU (JP)

Application Number:

PCT/JP2007/052081

Publication Date:

August 30, 2007

Filing Date:

February 07, 2007

Export Citation:

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Assignee:

COVALENT MATERIALS CORP (JP)
TOKYO ELECTRON LTD (JP)
SHIBATA KAZUO (JP)
KAWASAKI HIROO (JP)
IWATA TERUO (JP)
AMIKURA MANABU (JP)

International Classes:

H05B3/86; H05B3/14; H05B3/74

Foreign References:

JP2004247210A	2004-09-02
JP2006049270A	2006-02-16
JP2004247210A	2004-09-02
US20030000937A1	2003-01-02
JP2000173750A	2000-06-23
JP2001332373A	2001-11-30

Other References: