Title:
PLASMA MEASUREMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/238928
Kind Code:
A1
Abstract:
This plasma measurement device comprises: a laser light source 20 that emits laser light LA toward plasma PL; a spectrum measurement unit 30 that receives plasma scattered light LP from the plasma PL and measures the wavelength spectrum of such light; and an arithmetic unit 40 that calculates the electron temperature and the electron density of the plasma PL on the basis of the measured wavelength spectrum. The spectrum measurement unit 30 comprises a spectrometer having an incidence slit S1. The incidence slit S1 includes: two blades 31, 32 that are movable in an X direction within an XY plane perpendicular to the traveling direction of the plasma scattered light LP; and at least one blade 33 that is movable in a Y direction perpendicular to the X direction. The slit shape is configured using the edges of at least the three blades 31–33. This configuration makes it possible to perform more accurate measurements while easing structural constraints on plasma measurement.
Inventors:
TOMITA KENTARO (JP)
Application Number:
PCT/JP2023/021530
Publication Date:
December 14, 2023
Filing Date:
June 09, 2023
Export Citation:
Assignee:
UNIV HOKKAIDO NAT UNIV CORP (JP)
International Classes:
G01N21/63
Domestic Patent References:
| WO2016117118A1 | 2016-07-28 |
Foreign References:
| JP2008046136A | 2008-02-28 | |||
| JP2000337961A | 2000-12-08 | |||
| JPH07198595A | 1995-08-01 | |||
| JPH0452548A | 1992-02-20 | |||
| KR20120137126A | 2012-12-20 |
Other References:
"Variable slit / SLX-1", Retrieved from the Internet [retrieved on 20230808]
ANONYMOUS: "Variable Slit SLX – 1/61 – 6995 – 72", 25 May 2018 (2018-05-25), XP093114869, Retrieved from the Internet
MURAOKA KATSUNORI, BOWDEN MARK D, UCHINO KIICHIRO, SUETOME YASUHIRO, NOGUCHI MASANORI, MANSOUR MANSOUR A,: "The ultimate detection capability of measuring spectra of laser Thomson scattering for plasma diagnostics", ENGINEERING SCIENCES REPORTS, KYUSHU UNIVERSITY, vol. 21, no. 2, 1 January 1999 (1999-01-01), pages 155 - 160, XP093114892, DOI: 10.15017/16556
ANONYMOUS: "Variable Slit SLX – 1/61 – 6995 – 72", 25 May 2018 (2018-05-25), XP093114869, Retrieved from the Internet
MURAOKA KATSUNORI, BOWDEN MARK D, UCHINO KIICHIRO, SUETOME YASUHIRO, NOGUCHI MASANORI, MANSOUR MANSOUR A,: "The ultimate detection capability of measuring spectra of laser Thomson scattering for plasma diagnostics", ENGINEERING SCIENCES REPORTS, KYUSHU UNIVERSITY, vol. 21, no. 2, 1 January 1999 (1999-01-01), pages 155 - 160, XP093114892, DOI: 10.15017/16556
Attorney, Agent or Firm:
YAMAO, Norihito et al. (JP)
Download PDF: