POLISHING COMPOSITION AND POLISHING METHOD USING SAME

Title:

POLISHING COMPOSITION AND POLISHING METHOD USING SAME

Document Type and Number:

WIPO Patent Application WO/2021/049154

Kind Code:

A1

Abstract:

The present invention provides a means capable of achieving a higher polishing rate than conventional means, for a polishing composition for polishing various materials, and particularly, for polishing various materials including a resin. The present invention relates to a polishing composition comprising alumina particles and a dispersion medium, wherein the alumina particles have a breaking strength of 0.5 GPa or more, or the alumina particles are prepared by a deflagration method.

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Inventors:

ONISHI SHOGO (JP)
ISHIDA YASUTO (JP)
MAE RYOTA (JP)

Application Number:

PCT/JP2020/027089

Publication Date:

March 18, 2021

Filing Date:

July 10, 2020

Export Citation:

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Assignee:

FUJIMI INC (JP)

International Classes:

C09G1/02; B24B37/00; C09K3/14; H01L21/304

Foreign References:

JP2009501688A	2009-01-22
JP2017190267A	2017-10-19
JP2016183212A	2016-10-20
JP2009511719A	2009-03-19
JPH0261220B2	1990-12-19
JPS60255602A	1985-12-17
US20120156494A1	2012-06-21
CN107555455A	2018-01-09

Other References:

TONIOLO, J.C. ET AL.: "Synthesis of alumina powders by the glycine-nitrate combustion process", MATERIALS RESEARCH BULLETIN, vol. 40, 2005, pages 561 - 571, XP004753216, ISSN: 0025-5408, DOI: 10.1016/j.materresbull.2004.07.019

Attorney, Agent or Firm:

HATTA & ASSOCIATES (JP)

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