PH/REDOX POTENTIAL-ADJUSTED WATER PRODUCTION APPARATUS

WIPO Patent Application WO/2022/034712

A1

This pH/redox potential-adjusted water production apparatus 1 is provided with a platinum group metal supporting resin column 3 in a supply line 2 of ultrapure water W, the ultrapure water supply line 2 subsequently branching into a first adjusted water production line 4 and a second adjusted water production line 5. A pH adjusting agent tank 41 communicates with the first adjusted water production line 4, a redox potential adjusting agent tank 42 also communicates with the first adjusted water production line 4, and a first storage tank 43 is provided at a stage after the redox potential adjusting agent tank 42. A pH adjusting agent tank 51 communicates with the second adjusted water production line 5, a redox potential adjusting agent tank 52 also communicates with the second adjusted water production line 5, and a second storage tank 53 is provided at a stage after the redox potential adjusting agent tank 52. With such pH/redox potential-adjusted water production apparatus, it is possible to dissolve a predetermined amount of the wiring metal in a wiring manufacturing process for a semiconductor in which a transition metal such as cobalt is used as the wiring metal.

GAN NOBUKO (JP)

PCT/JP2021/011276

February 17, 2022

March 18, 2021

Click for automatic bibliography generation  

KURITA WATER IND LTD (JP)

C02F1/66; H01L21/304; H01L21/306; H01L21/308

JP2018167245A	2018-11-01
JP2006114884A	2006-04-27
JPH07263430A	1995-10-13
JP2014192353A	2014-10-06
JP2019147112A	2019-09-05
JP2018182212A	2018-11-15

HAYAKAWA Yuzi et al. (JP)

View/Download PDF      PDF Help

Previous Patent: SPECIMEN TRANSPORT DEVICE, SPECIMEN ANALYSIS SYSTEM, AND SPECIMEN PRETREATMENT DEVICE

Next Patent: VALVE STEM AND TIRE VALVE