POWER SUPPLY MODULE AND MASS SPECTROMETRY DEVICE

Title:

POWER SUPPLY MODULE AND MASS SPECTROMETRY DEVICE

Document Type and Number:

WIPO Patent Application WO/2021/075171

Kind Code:

A1

Abstract:

According to the present invention, the performance of a power supply module is enhanced. Specifically, the occurrence of discharge is prevented in a power supply module and the power supply module is miniaturized. As the means, the power supply module is provided with a plurality of boards which overlap when viewed in a plan view. Here, a low voltage circuit 3 and a high voltage circuit are formed in a first board 2 with a distance L maintained for preventing creeping discharge therebetween, and a low voltage circuit 5 is formed in a second board 4. In addition, the distance between a component composing a high voltage AC circuit 8 formed in the high voltage circuit and a component composing the low voltage circuit 5 is three times or more than the shortest distance D which does not cause space discharge between a component composing a high voltage DC circuit 7 formed in the high voltage circuit and the component composing the low voltage circuit 5.

Inventors:

ONG ZIHAO (JP)
NISHIMOTO TAKUMA (JP)
FURUYA ISAO (JP)
TOUDA HIROSHI (JP)

Application Number:

PCT/JP2020/033669

Publication Date:

April 22, 2021

Filing Date:

September 04, 2020

Export Citation:

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Assignee:

HITACHI HIGH TECH CORP (JP)

International Classes:

H01J49/10; H01J49/26; H01J49/42; H02M3/28

Foreign References:

JP2011067093A	2011-03-31
JPH0799777A	1995-04-11
KR20170072037A	2017-06-26
US20050205970A1	2005-09-22
JP99777A	1977-01-08

Other References: