Title:
INSPECTION SYSTEM AND NON-TRANSITORY COMPUTER-READABLE MEDIUM
Document Type and Number:
WIPO Patent Application WO/2021/075170
Kind Code:
A1
Abstract:
The present disclosure proposes an inspection system for detecting foreign matter that sticks or damage that has been formed on a bevel of an edge part of a semiconductor wafer. In order to detect such foreign matter or defects on a bevel without using a reference image, the system comprises a learning device (905) that outputs, as a learning result, information pertaining to the foreign matter that sticks or damage that has been formed on the bevel. The learning device has implemented learning in advance by using image data acquired by an image acquisition tool and the information pertaining to the foreign matter or damage on the bevel, which is included in the image data. The image data obtained by the image acquisition tool is inputted to the learning machine so as to detect the foreign matter or damage.
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Inventors:
HIRAI TAKEHIRO (JP)
MINEKAWA YOHEI (JP)
TAKADA SATOSHI (JP)
MINEKAWA YOHEI (JP)
TAKADA SATOSHI (JP)
Application Number:
PCT/JP2020/033626
Publication Date:
April 22, 2021
Filing Date:
September 04, 2020
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
G01N23/2251; G01N23/2252; G06T7/00
Foreign References:
| US20190304826A1 | 2019-10-03 | |||
| JP2019109563A | 2019-07-04 | |||
| JP2004191187A | 2004-07-08 | |||
| JP2001343336A | 2001-12-14 | |||
| JP2015036719A | 2015-02-23 | |||
| JP2014067863A | 2014-04-17 | |||
| US20100140498A1 | 2010-06-10 | |||
| JP2017532564A | 2017-11-02 | |||
| JPH08201317A | 1996-08-09 | |||
| JP2009063493A | 2009-03-26 |
Attorney, Agent or Firm:
HIRAKI & ASSOCIATES (JP)
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