Title:
PREPARATION METHOD FOR SPLICED SMALL-SIZED SINGLE CRYSTAL THIN FILM, SINGLE CRYSTAL THIN FILM AND RESONATOR
Document Type and Number:
WIPO Patent Application WO/2020/181815
Kind Code:
A1
Abstract:
The present invention relates to the technical field of single crystal thin film preparation, and in particular, to a preparation method for a spliced small-sized single crystal thin film, a single crystal thin film and a resonator. The preparation method comprises steps of: selecting at least two small-sized single crystal wafers, and implanting high-energy ions into a lower surface of each of the small-sized single crystal wafers; defining bonding regions matching each of the small-sized single crystal wafers on an upper surface of a substrate, preparing a bonding layer matching each of the small-sized single crystal wafers in the bonding region, stacking each of the small-sized single crystal thin films one by one in a corresponding bonding region, and peeling the upper piezoelectric layer, so as to prepare a spliced single crystal thin film. The present invention solves the technical problem in the prior art that the existing small-sized single crystal wafer cannot prepare a single crystal thin film larger than its own size, and the existing single crystal thin film cannot satisfy the application of a multifunctional device by means of the design of splicing a small-sized single crystal thin film onto a large substrate.
Inventors:
LUO WENBO (CN)
WU CHUANGUI (CN)
SHUAI YAO (CN)
WU CHUANGUI (CN)
SHUAI YAO (CN)
Application Number:
PCT/CN2019/118078
Publication Date:
September 17, 2020
Filing Date:
November 13, 2019
Export Citation:
Assignee:
UNIV ELECTRONIC SCI & TECH CHINA (CN)
International Classes:
C30B29/00; C30B31/22; C30B29/30; C30B29/40; H03H3/02; H03H9/17
Foreign References:
| CN109989111A | 2019-07-09 | |||
| CN109913954A | 2019-06-21 | |||
| CN107508569A | 2017-12-22 | |||
| CN108063185A | 2018-05-22 | |||
| CN108010834A | 2018-05-08 |
Attorney, Agent or Firm:
UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY CENTER OF PATENT (CN)
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