Title:
PRESSURE-TYPE FLOW CONTROL DEVICE AND FLOW CONTROL METHOD
Document Type and Number:
WIPO Patent Application WO/2018/180745
Kind Code:
A1
Abstract:
Provided is a pressure-type flow control device, comprising: a constraining part; a control valve disposed on the upstream side of the constraining part; an upstream pressure sensor for detecting pressure between the constraining part and the control valve; and a computation processing circuit connected to the control valve and the upstream pressure sensor. Said device is configured to perform flow control by controlling the control valve on the basis of the output of the upstream pressure sensor. When performing the action of closing the control valve in order to reduce the flow of fluid through the constraining part, the computation processing circuit performs the valve-closing action by means of feedback control that takes as a target value an exponential function more moderate than the pressure drop performance data associated with the outflow of gas from the constraining part.
Inventors:
SUGITA KATSUYUKI (JP)
HIRATA KAORU (JP)
IKEDA NOBUKAZU (JP)
NISHINO KOUJI (JP)
TAKIMOTO MASAHIKO (JP)
IMAI TAKAHIRO (JP)
OGAWA SHINYA (JP)
HIRATA KAORU (JP)
IKEDA NOBUKAZU (JP)
NISHINO KOUJI (JP)
TAKIMOTO MASAHIKO (JP)
IMAI TAKAHIRO (JP)
OGAWA SHINYA (JP)
Application Number:
PCT/JP2018/010944
Publication Date:
October 04, 2018
Filing Date:
March 20, 2018
Export Citation:
Assignee:
FUJIKIN KK (JP)
International Classes:
G05D7/06
Foreign References:
| JP2000122725A | 2000-04-28 | |||
| JPH0619557A | 1994-01-28 |
Attorney, Agent or Firm:
TANIDA Ryuichi et al. (JP)
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