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Title:
PROBE CARD AND TEST SYSTEM
Document Type and Number:
WIPO Patent Application WO/2023/135889
Kind Code:
A1
Abstract:
This probe card comprises: a probe guide that holds a probe; and a probe substrate laminated on the probe guide. The probe substrate has a first surface facing a tester head, and a second surface facing the probe guide, and is provided with a through hole so as to be penetrated from the first surface to the second surface. When air inside the through hole is discharged by vacuum suctioning in a state where the probe substrate is in contact with the tester head, the probe guide is brought into contact with the probe substrate.

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Inventors:
NARITA HISAO (JP)
HIROTA HIDEKI (JP)
SHIMOZAWA SHOGO (JP)
Application Number:
PCT/JP2022/039767
Publication Date:
July 20, 2023
Filing Date:
October 25, 2022
Export Citation:
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Assignee:
NIHON MICRONICS KK (JP)
International Classes:
G01R1/073; H01L21/66
Foreign References:
JP2013137241A2013-07-11
JP2018155527A2018-10-04
JP2014089121A2014-05-15
JP2017112259A2017-06-22
JP2009295686A2009-12-17
JPH07135240A1995-05-23
JP2000286313A2000-10-13
KR20050035926A2005-04-20
Attorney, Agent or Firm:
MIYOSHI Hidekazu et al. (JP)
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