PROBE, PROBE-HOLDING DEVICE, AND METHOD FOR MANUFACTURING PROBE

Title:

PROBE, PROBE-HOLDING DEVICE, AND METHOD FOR MANUFACTURING PROBE

Document Type and Number:

WIPO Patent Application WO/2023/181754

Kind Code:

A1

Abstract:

This probe has a distal-end part, an arm part, a support part, and a guide part. The distal-end part has a contact section that comes into contact with a body to be inspected. The arm part is a cantilever structure having a connecting arm for linking a free end and a fixed end, the free end being connected to the distal-end part. The support part is connected to the fixed end. The guide part is connected to an installation region on the arm part facing in a distal-end direction in which the body to be inspected is positioned as viewed from the contact section, the guide part protruding farther in the distal-end direction than the installation region.

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Inventors:

KISHI YASUTAKA (JP)

Application Number:

PCT/JP2023/006204

Publication Date:

September 28, 2023

Filing Date:

February 21, 2023

Export Citation:

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Assignee:

NIHON MICRONICS KK (JP)

International Classes:

G01R1/067

Domestic Patent References:

WO2019138505A1	2019-07-18
WO2007108110A1	2007-09-27
WO2017022035A1	2017-02-09

Foreign References:

JP2004340654A	2004-12-02
JP2006189370A	2006-07-20
JP2010169648A	2010-08-05
JP2021512283A	2021-05-13

Attorney, Agent or Firm:

MIYOSHI Hidekazu et al. (JP)

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