Title:
PROBER HAVING ELECTRICAL EQUIPMENT MAINTENANCE DOOR
Document Type and Number:
WIPO Patent Application WO/2022/270875
Kind Code:
A1
Abstract:
Disclosed is a prober having an electric equipment maintenance door capable of power supply and control for each independent cell. A prober having an electrical equipment maintenance door, according to one embodiment of the present invention, comprises: a frame composed of a plurality of cells so as to form a group prober; a prober stage chamber mounted on each cell of the frame and to which a probe card and a wafer are supplied to be inspected; and an electrical equipment maintenance door installed at one side of the prober stage chamber to expose or close off the inside of the prober stage chamber, wherein the electrical equipment maintenance door has a space for accommodating electric components formed inside a door body so as to control an electrical operation inside the prober stage chamber, and a power line and a communication line are introduced from the outside to be connected to the electric components inside the prober stage chamber such that a prober installed in each cell may be individually controllable.
Inventors:
ROH CHANG HOON (KR)
PARK KI TACK (KR)
PARK NAM WOO (KR)
PARK KI TACK (KR)
PARK NAM WOO (KR)
Application Number:
PCT/KR2022/008804
Publication Date:
December 29, 2022
Filing Date:
June 21, 2022
Export Citation:
Assignee:
SEMICS INC (KR)
International Classes:
G01R31/28
Foreign References:
| KR20210019193A | 2021-02-22 | |||
| KR20150054813A | 2015-05-20 | |||
| KR101614584B1 | 2016-04-21 | |||
| KR20200080443A | 2020-07-07 | |||
| KR20180065422A | 2018-06-18 |
Attorney, Agent or Firm:
ERUUM & LEEON INTELLECTUAL PROPERTY LAW FIRM (KR)
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