Title:
PROCESS CHAMBER, AND HEATING CONTROL METHOD AND DEVICE FOR PROCESS CHAMBER
Document Type and Number:
WIPO Patent Application WO/2019/206137
Kind Code:
A1
Abstract:
Disclosed are a process chamber, and a heating control method and device for the process chamber. The process chamber (1) comprises: a heating portion (10) located at the bottom of the process chamber (1) and comprising: a heating plate (101), and N heating devices (102) located under the heating plate (101), the N heating devices (102) respectively heating N heating regions distributed on an upper surface of the heating plate (101), where N is an integer greater than or equal to 1; a temperature-measuring portion (11) located on a sidewall of the process chamber (1) for measuring N induction temperatures of the N heating regions distributed on the upper surface of the heating plate (101); and a controller (12), which is connected to the temperature-measuring portion (11) and the heating portion (10) and controls the heating power of each of the N heating devices (102) according to the N induction temperatures measured by the temperature-measuring portion (11). The process chamber and the heating control method and device for the process chamber can prevent the deformation or even breakage of the heating devices caused by uneven heating due to an excessive temperature difference, and the real heating uniformity of an article to be treated can be ensured.
Inventors:
JIN ZIYU (CN)
ZHANG YIN (CN)
WEI FUQIANG (CN)
ZHANG YIN (CN)
WEI FUQIANG (CN)
Application Number:
PCT/CN2019/083885
Publication Date:
October 31, 2019
Filing Date:
April 23, 2019
Export Citation:
Assignee:
BEIJING APOLLO DING RONG SOLAR TECH CO LTD (CN)
International Classes:
H01L21/67; G05D23/24
Domestic Patent References:
| WO2016186302A1 | 2016-11-24 |
Foreign References:
| CN108376662A | 2018-08-07 | |||
| CN208478290U | 2019-02-05 | |||
| CN103374698A | 2013-10-30 | |||
| CN105441899A | 2016-03-30 | |||
| CN107836038A | 2018-03-23 | |||
| CN202380087U | 2012-08-15 |
Attorney, Agent or Firm:
AFD CHINA INTELLECTUAL PROPERTY LAW OFFICE (CN)
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