Title:
PROCESS FOR PRODUCING THIN ORGANIC FILM
Document Type and Number:
WIPO Patent Application WO/2016/063463
Kind Code:
A1
Abstract:
The present invention addresses the problem of providing a process for thin-organic-film production whereby a thin organic film that is dense can be formed on substrates constituted of various materials, in cases when the substrates are brought into contact with a solution for thin-organic-film formation which contains a metal-based surfactant as a main raw material, after an ultraviolet/ozone treatment as the only treatment.
The following steps (A) and (B) are conducted: step (A) in which the surface of a substrate is treated with light from an excimer lamp containing Xe gas enclosed therein and with ozone generated by the light from an excimer lamp containing Xe gas enclosed therein; and step (B) in which the substrate is subsequently brought into contact with an organic-solvent solution containing both a metal-based surfactant having at least one hydrolyzable group and a compound capable of interacting with the metal-based surfactant.
Inventors:
SHIBATA HIROMOTO (JP)
Application Number:
PCT/JP2015/005023
Publication Date:
April 28, 2016
Filing Date:
October 02, 2015
Export Citation:
Assignee:
NIPPON SODA CO (JP)
International Classes:
B05D3/10; B05D3/06; B05D7/24; B32B9/00; C23C26/00
Domestic Patent References:
| WO2006070857A1 | 2006-07-06 | |||
| WO2014156161A1 | 2014-10-02 |
Foreign References:
| JP2011251460A | 2011-12-15 | |||
| JP2012086393A | 2012-05-10 | |||
| JPS62236713A | 1987-10-16 | |||
| JPH08337654A | 1996-12-24 |
Attorney, Agent or Firm:
HIROTA, Masanori (JP)
Masaki Hirota (JP)
Masaki Hirota (JP)
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