Title:
SURFACE PLATE TRANSPORT DOLLY
Document Type and Number:
WIPO Patent Application WO/2016/063464
Kind Code:
A1
Abstract:
The present invention is a surface plate transport dolly that is for transporting a surface plate that has been removed from a polishing device or a surface plate that is to be installed on the polishing device. The surface plate transport dolly is provided with a surface plate holding unit that is for holding the surface plate, with a support stand that supports the surface plate holding unit from the bottom side, with an elevation mechanism that raises/lowers the surface plate holding unit, and with a tilting mechanism that tilts the surface plate holding unit that holds the surface plate. The surface plate transport dolly is characterized by being capable of transporting the surface plate while the surface plate holding unit that holds the surface plate has been tilted by the tilting mechanism. Thereby provided is a surface plate transport dolly that has a narrow width when transporting a surface plate and that can narrow the width of a path for transporting the surface plate.
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Inventors:
SATO MICHITO (JP)
KANAI YOSUKE (JP)
KANAI YOSUKE (JP)
Application Number:
PCT/JP2015/005024
Publication Date:
April 28, 2016
Filing Date:
October 02, 2015
Export Citation:
Assignee:
SHINETSU HANDOTAI KK (JP)
FUJIKOSHI MACHINERY CORP (JP)
FUJIKOSHI MACHINERY CORP (JP)
International Classes:
B24B37/34; H01L21/304
Foreign References:
| JP2000141205A | 2000-05-23 | |||
| JP2012096893A | 2012-05-24 | |||
| JP2009184775A | 2009-08-20 | |||
| US3813825A | 1974-06-04 |
Attorney, Agent or Firm:
YOSHIMIYA, Mikio (JP)
Good Miya Mikio (JP)
Good Miya Mikio (JP)
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