Title:
PROCESSING APPARATUS, PROCESSING METHOD AND METHOD OF MANUFACTURING COMPONENT
Document Type and Number:
WIPO Patent Application WO/2016/117327
Kind Code:
A1
Abstract:
A processing apparatus includes: a tool in which a processing surface includes a catalyst material including a transition metal that assists hydrolysis of a surface to be processed of an object to be processed that is immersed in water; and a control unit that controls a relative distance between the surface to be processed of the object and the processing surface of the tool with respect to a direction including a surface normal direction of the surface to be processed; wherein the surface to be processed is processed by performing, by the control unit, catalytic reaction control that alternately generates: a first state in which the surface to be processed and the processing surface do not contact; and a second state in which the surface to be processed and the processing surface contact, or approach each other to a distance at which a catalytic reaction becomes effective.
Inventors:
SADAKUNI SHUN (JP)
MIYAUCHI HIROKI (JP)
ANDO MANABU (JP)
YAMAUCHI KAZUTO (JP)
MIYAUCHI HIROKI (JP)
ANDO MANABU (JP)
YAMAUCHI KAZUTO (JP)
Application Number:
PCT/JP2016/000236
Publication Date:
July 28, 2016
Filing Date:
January 19, 2016
Export Citation:
Assignee:
UNIV OSAKA (JP)
CANON KK (JP)
CANON KK (JP)
International Classes:
B23K20/10; B24B7/24
Foreign References:
| US20140326612A1 | 2014-11-06 | |||
| JPS60196948A | 1985-10-05 |
Attorney, Agent or Firm:
OKABE, Yuzuru et al. (1-6-5 Marunouchi Chiyoda-k, Tokyo 05, JP)
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