Title:
PROCESSING APPARATUS AND PROCESSING METHOD
Document Type and Number:
WIPO Patent Application WO/2023/218582
Kind Code:
A1
Abstract:
The present invention can adjust the pitch of interference fringes mainly. The present invention relates to a processing apparatus (1) that processes a surface (4a) of an object (4) by using a light beam (3) from a light source (2). The processing apparatus (1) comprises: a light splitting member (13) that splits the light beam (3) from the light source (2) into a plurality of light beams (11, 12) traveling in mutually different directions; and a first optical system (15) that forms interference fringes (14) by allowing the plurality of light beams (11, 12) split by the light splitting member (13) to pass therethrough and irradiating the surface (4a) of the object (4) with the superimposed light beams. The processing apparatus also includes a second optical system (19) that is arranged in a space (16) between the light splitting member (13) and the first optical system (15) to be movable along an optical axis (17) of the first optical system (15) and that adjusts the pitch of the interference fringes (14) by changing the intersection angle (18) of the plurality of light beams (11, 12) propagating from the first optical system (15) to the surface (4a) of the object (4).
Inventors:
YANAGI TSUYOSHI (JP)
Application Number:
PCT/JP2022/019997
Publication Date:
November 16, 2023
Filing Date:
May 11, 2022
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
B23K26/06
Foreign References:
| JP2003334683A | 2003-11-25 | |||
| JPH10166172A | 1998-06-23 | |||
| JPH09248686A | 1997-09-22 | |||
| JP2004339538A | 2004-12-02 | |||
| JPH10249570A | 1998-09-22 |
Attorney, Agent or Firm:
CREO LAW & INTELLECTUAL PROPERTY (JP)
Download PDF: