Title:
PROCESSING OPTICAL SYSTEM, PROCESSING DEVICE, AND PROCESSING METHOD
Document Type and Number:
WIPO Patent Application WO/2023/218581
Kind Code:
A1
Abstract:
[Problem] To provide a processing optical system, a processing device, and a processing method capable of efficiently utilizing processing light from a processing light source to form interference fringes. [Solution] A processing optical system (15) comprises: a dividing optical member (17) for emitting, from mutually different emission positions, a second group G2 of a plurality of processing light beams EL2 and a third group G3 of a plurality of processing light beams EL3, generated by dividing a first group G1 of a plurality of processing light beams EL from a light source (2); and an interference fringe forming optical system (18) for forming first interference fringes IS1 by causing the second group G2 of the plurality of processing light beams LE2 from the dividing optical member (17) to interfere in a first region A1 on a top surface of an object (W), and forming second interference fringes IS2 by causing the third group G3 of the plurality of processing light beams LE3 from the dividing optical member (17) to interfere in a second region A2, different from the first region A1, on the top surface of the object (W).
Inventors:
YANAGI TSUYOSHI (JP)
Application Number:
PCT/JP2022/019996
Publication Date:
November 16, 2023
Filing Date:
May 11, 2022
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
B23K26/364; B23K26/352
Domestic Patent References:
| WO2019082312A1 | 2019-05-02 |
Foreign References:
| JP2007073546A | 2007-03-22 | |||
| JP2007027350A | 2007-02-01 |
Attorney, Agent or Firm:
CREO LAW & INTELLECTUAL PROPERTY (JP)
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