Title:
PROCESSING MACHINE AND METHOD FOR MANUFACTURING OBJECT TO BE PROCESSED
Document Type and Number:
WIPO Patent Application WO/2023/062973
Kind Code:
A1
Abstract:
In a processing machine 1, a Z-axis electric motor 39 moves a main shaft 37 in a Z direction. A Z-axis position sensor 69 detects a position of the main shaft 37 in the Z direction. A rotation sensor 71 detects rotation of the main shaft 37. A control unit 5, when a workpiece 103 is processed by a tool 101 in a state in which the main shaft 37 is rotating, controls the Z-axis electric motor 39 on the basis of a detection value of the Z-axis position sensor 69 so as to move the main shaft 37 to a relative position set with respect to a predetermined reference position in the Z direction. The control unit 5 acquires, as the reference position, a position detected by the Z-axis position sensor 69 when a stop in rotation of the main shaft 37 is detected by the rotation sensor 71 in a situation in which the main shaft 37 while being rotated moves in the Z direction and the tool 101 and the workpiece 103 contact each other in the Z direction.
Inventors:
AKIYAMA TAKANOBU (JP)
Application Number:
PCT/JP2022/033377
Publication Date:
April 20, 2023
Filing Date:
September 06, 2022
Export Citation:
Assignee:
SHIBAURA MACHINE CO LTD (JP)
International Classes:
B23Q17/22; B24B47/22; B24B27/06; B24B41/04; B24B49/16; B24B55/02; H01L21/301
Foreign References:
| JPH1177491A | 1999-03-23 | |||
| JPH08112754A | 1996-05-07 |
Attorney, Agent or Firm:
IIJIMA, Yasuhiro (JP)
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