Title:
RADICAL GENERATION DEVICE AND ION ANALYSIS DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/059247
Kind Code:
A1
Abstract:
One embodiment of the radical generation device comprises a cylindrical tube (410) that comprises a dielectric and is to have a plasma source introduced thereinto, an antenna (411) that comprises a conductor and is wound around the cylindrical tube, an outside conductor part (412) that has the cylindrical tube inserted therethrough and has a conductive inner surface that is coaxial with the cylindrical tube and, in cross-section, is a circle that is concentric with the cylindrical tube, and a connection part (420) that is a cylindrical body that is inserted into the space between the inner circumferential surface of the outside conductor part and an outer circumferential surface of the cylindrical tube and is connected to and thereby electrically connects the inner circumferential surface of the outside conductor part and the antenna. The connection part is a two-layered cylindrical tube structure that includes an inner cylinder (421) and an outer cylinder (424). A plurality of separated pieces (421b, 424b) that are separated in the circumferential direction by notches that extend in the axial direction are formed at respective end parts of the inner cylinder and the outer cylinder that are on the same side thereof. Taper parts (421c) that expand outward toward the tip-end side or that expand inward toward the tip-end side are formed outside the separated parts of the inner cylinder or inside the separated parts of the outer cylinder, respectively.
Inventors:
FURUTA MASAJI (JP)
Application Number:
PCT/JP2021/016638
Publication Date:
March 24, 2022
Filing Date:
April 26, 2021
Export Citation:
Assignee:
SHIMADZU CORP (JP)
International Classes:
H05H1/30; G01N27/62; H01J49/00
Foreign References:
| JP2003194723A | 2003-07-09 | |||
| JP2016192408A | 2016-11-10 | |||
| JP2016529652A | 2016-09-23 | |||
| JP2007142444A | 2007-06-07 | |||
| US20120217876A1 | 2012-08-30 | |||
| JP2019191081A | 2019-10-31 |
Other References:
YUJI SHIMABUKURO: "Tandem Mass Spectrometry of Peptide Ions by Microwave Excited-Hydrogen and Water Plasmas", ANALYTICAL CHEMISTRY, vol. 90, no. 12, 2018, pages 7239 - 7245, XP055787273, DOI: 10.1021/acs.analchem.8b00344
YUJI SHIMABUKURO: "Comprehensive Study on the Low-energy Atomic Hydrogen Beam: From Production to Velocity Distribution Measurement", 8 April 2020, DOSHISHA UNIVERSITY ACADEMIC
See also references of EP 4216679A4
YUJI SHIMABUKURO: "Comprehensive Study on the Low-energy Atomic Hydrogen Beam: From Production to Velocity Distribution Measurement", 8 April 2020, DOSHISHA UNIVERSITY ACADEMIC
See also references of EP 4216679A4
Attorney, Agent or Firm:
KYOTO INTERNATIONAL PATENT LAW OFFICE (JP)
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