RAW MATERIAL EVAPORATION SYSTEM, CONCENTRATION CONTROL MODULE USED IN SAME, CONCENTRATION CONTROL METHOD, AND CONCENTRATION CONTROL PROGRAM

WIPO Patent Application WO/2022/270019

A1

The present invention, in order to suppress an overshoot of the concentration of a raw material gas that occurs when switching from a bypass operation to a raw material gas generating operation, provides a concentration control module for use in a raw material vaporization device that performs a raw material gas generating operation in which a carrier gas is introduced into a tank containing a raw material and the raw material is vaporized by bubbling to derive raw material gas, and a bypass operation in which the carrier gas is flown through a bypass path to bypass from the tank. The concentration control module performs concentration control in the raw material gas generating operation and pressure control in the bypass operation.

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SHIMIZU TORU (JP)

PCT/JP2022/009512

December 29, 2022

March 04, 2022

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HORIBA STEC CO LTD (JP)

H01L21/205; C23C16/448; H01L21/304

JP2014224307A

2014-12-04

NISHIMURA, Ryuhei (JP)

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