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Title:
REAL-TIME AUTOMATIC FOCUSING SYSTEM FOR MICROSCOPE
Document Type and Number:
WIPO Patent Application WO/2021/184169
Kind Code:
A1
Abstract:
A real-time automatic focusing system for a microscope, comprising an infrared light source module, an offset lens light path module, a detection module, and a focusing control module. The infrared light source module is used for emitting parallel laser beams; the offset lens light path module expands the parallel laser beams emitted by the infrared light source module into divergent light, and irradiates a sample interface (11) by means of a microscope objective lens (10), so that laser diffraction spots irradiated on the sample interface (11) form comet-shaped aberration; the detection module modulates comet-shaped diffraction spots formed by reflection of the sample interface (11) into linear spots and obtains defocusing amount related information of the microscopic system under the current field of view by analyzing the linear spots; and the focusing control module iteratively controls the axial movement of the microscope objective lens (10) based on the obtained defocusing amount related information until the defocusing amount meets a set target.

Inventors:
LI SIHONG (CN)
HUANG SHUQIANG (CN)
FU XIONGFEI (CN)
YU YUE (CN)
WEN HUI (CN)
Application Number:
PCT/CN2020/079547
Publication Date:
September 23, 2021
Filing Date:
March 16, 2020
Export Citation:
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Assignee:
SHENZHEN INST OF ADV TECH CAS (CN)
International Classes:
G02B21/00; G02B7/28
Domestic Patent References:
WO2003077008A22003-09-18
Foreign References:
CN104932092A2015-09-23
CN110809113A2020-02-18
CN108646396A2018-10-12
CN102597841A2012-07-18
CN107407791A2017-11-28
CN105093479A2015-11-25
JP2005062515A2005-03-10
Attorney, Agent or Firm:
BEIJING CHENGHUI LAW FIRM (CN)
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