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Title:
RECEPTOR SUBSTRATE , METHOD FOR MANUFACTURING RECEPTOR SUBSTRATE, TRANSFER METHOD, LED PANEL MANUFACTURING METHOD, AND STAMPER
Document Type and Number:
WIPO Patent Application WO/2023/063358
Kind Code:
A1
Abstract:
[Problem] To provide a receptor substrate with which it is possible to increase the rate of success of picking-up of a transferred object to be transferred during a transfer using a stamper, a method for manufacturing the receptor substrate, and a transfer method and an LED panel manufacturing method using the receptor substrate. [Solution] A receptor substrate on which a plurality of transferred objects to be transferred onto another substrate using a stamper are disposed, the receptor substrate comprising: a plurality of sections in each of which a group of transferred objects to be simultaneously transferred in a single transfer operation of the stamper are disposed; and a non-disposed region outside the sections in which the transferred objects are not disposed, each of the plurality of sections being surrounded by the non-disposed region.

Inventors:
YAMAOKA HIROSHI (JP)
KURATA MASAMI (JP)
USAMI TAKETO (JP)
OGAWA YOSHINORI (JP)
KONDO KAZUNORI (JP)
Application Number:
PCT/JP2022/038067
Publication Date:
April 20, 2023
Filing Date:
October 12, 2022
Export Citation:
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Assignee:
SHINETSU CHEMICAL CO (JP)
International Classes:
H01L21/60; H01L21/52; H01L21/683
Foreign References:
JP2019176129A2019-10-10
JP2019068055A2019-04-25
JP2021097220A2021-06-24
JP2020042247A2020-03-19
JP2006093368A2006-04-06
JP2021150614A2021-09-27
US20190035688A12019-01-31
JP2017524250A2017-08-24
JP2019102763A2019-06-24
JP2018032740A2018-03-01
JP2021052156A2021-04-01
US20210193630A12021-06-24
US20190027639A12019-01-24
US20180158806A12018-06-07
JP2021158329A2021-10-07
JP2020167251A2020-10-08
JP2020004478A2020-01-09
Attorney, Agent or Firm:
YOSHIMIYA Mikio et al. (JP)
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