Title:
RESONATOR AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/170682
Kind Code:
A1
Abstract:
The present application relates to a resonator and an electronic device. A dedicated micromachining process flow is used to successively arrange, in a stacked manner and on a substrate, a high/low-acoustic-impedance alternating layer, a bottom frequency-temperature coefficient compensation layer, a bottom electrode layer, a piezoelectric layer, a top electrode layer and a top frequency-temperature coefficient compensation layer, so as to form a new resonator. By means of this special laminated geometric structure, the resonator can present the excellent characteristics of a low loss, a wide bandwidth, low temperature sensitivity and a small size at the same time, thereby having better operation reliability.
Inventors:
GONG SONGBIN (CN)
VIDAL-ALVAREZ GABRIEL (CN)
VIDAL-ALVAREZ GABRIEL (CN)
Application Number:
PCT/CN2021/091520
Publication Date:
August 18, 2022
Filing Date:
April 30, 2021
Export Citation:
Assignee:
SPECTRON SHENZHEN TECH CO LTD (CN)
International Classes:
H03H9/17
Foreign References:
| CN109921759A | 2019-06-21 | |||
| CN103858342A | 2014-06-11 | |||
| CN112039479A | 2020-12-04 | |||
| US20090100657A1 | 2009-04-23 |
Attorney, Agent or Firm:
ADVANCE CHINA IP LAW OFFICE (CN)
Download PDF: