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Title:
ROBOT DEVICE AND METHOD FOR CONTROLLING SAME
Document Type and Number:
WIPO Patent Application WO/2023/223410
Kind Code:
A1
Abstract:
A robot device with a robot arm is provided, comprising: a calculation unit that finds a position of the robot arm on a first coordinate system, using detection results from a plurality of displacement sensors; a conversion unit that, when a plurality of reference marks are detected by a mark detection unit, finds a conversion relationship between the position of the robot arm on the first coordinate system and the positions of the reference marks on a second coordinate system; and a control unit that uses the conversion relationship to convert a target position specified on the second coordinate system into the position of the robot arm on the first coordinate system, and controls the position of the robot arm. Calibration of the position of the robot arm can be easily performed.

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Inventors:
MAGOME NOBUTAKA (JP)
Application Number:
PCT/JP2022/020479
Publication Date:
November 23, 2023
Filing Date:
May 17, 2022
Export Citation:
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Assignee:
NIKON CORP (JP)
International Classes:
B25J13/08
Foreign References:
JP2016052695A2016-04-14
CN112971984A2021-06-18
CN112025772A2020-12-04
Attorney, Agent or Firm:
OMORI Satoshi (JP)
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