Title:
SAMPLE HOLDER
Document Type and Number:
WIPO Patent Application WO/2023/189757
Kind Code:
A1
Abstract:
This sample holder comprises a ceramic plate, a base member, and a fixing mechanism. The ceramic plate has a first surface and a second surface opposite to the first surface. The base member is located on the second surface of the ceramic plate. The base member includes: a third surface facing the second surface; a fourth surface opposite to the third surface; and a through hole that is located at a position corresponding to a location inward from the periphery of the ceramic plate, and that passes through the third surface and the fourth surface. The fixing mechanism is positioned opposing the through hole in the base member, and fixes the base member and the ceramic plate.
Inventors:
MORITA MUSASHI (JP)
Application Number:
PCT/JP2023/010687
Publication Date:
October 05, 2023
Filing Date:
March 17, 2023
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
H01L21/683
Domestic Patent References:
| WO2018038044A1 | 2018-03-01 |
Foreign References:
| JP2013055089A | 2013-03-21 | |||
| JP2012204825A | 2012-10-22 | |||
| JP2020088327A | 2020-06-04 |
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
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