Title:
SAMPLE STAGE AND OPTICAL INSPECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/070265
Kind Code:
A1
Abstract:
In this sample stage that adsorbs and holds a sample, the configuration includes: an outer circumference stage that has a first adsorption surface and a pressure receiving chamber that is a recess formed in the center thereof; an inner circumference stage that has a second adsorption surface, and that is housed in the pressure receiving chamber and can project upward from the outer circumference stage; a first flow channel for a sample desorption operation that is formed on the outer circumference stage and is opened on the first adsorption surface; a second flow channel for the sample desorption operation that is formed on the outer circumference stage and the inner circumference stage and is opened on the second adsorption surface; and a third flow channel for inner circumference stage elevating driving that is formed on the outer circumference stage and is opened in the pressure receiving chamber.
Inventors:
YAMAMOTO MASAYA (JP)
Application Number:
PCT/JP2019/039712
Publication Date:
April 15, 2021
Filing Date:
October 08, 2019
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01L21/683; G01N21/956; H01L21/66
Domestic Patent References:
| WO2003071599A1 | 2003-08-28 |
Foreign References:
| JPH045646U | 1992-01-20 | |||
| JPS63115214U | 1988-07-25 | |||
| JPH0341935U | 1991-04-22 | |||
| JP2005116842A | 2005-04-28 | |||
| JPS6032324A | 1985-02-19 | |||
| JPS63142829A | 1988-06-15 | |||
| JPH05301137A | 1993-11-16 | |||
| JP2004253756A | 2004-09-09 |
Attorney, Agent or Firm:
KAICHI IP (JP)
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