Title:
SAMPLING DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/065418
Kind Code:
A1
Abstract:
In order to enable the reliable collection of particles in a suctioned gas and prevent the discharge of water mist, this sampling device (10) is provided with a container (21), air intake holes (33) provided in the container (21), and an exhaust pipe (24). The air intake holes (33) extend downward with respect to an orthogonal surface (21B) that is orthogonal to the axial line (21A) of the container (21). A spiral flow of a gas and a liquid is formed inside the container (21) by exhausting the gas from the exhaust pipe (24), and a liquid film (40) is formed inside the container (21). An opening (33a) of each of the air intake holes (33) opens in a region other than the liquid film (40), and the suctioned gas is jetted from the air intake holes (33) toward the liquid film (40).
Inventors:
TAMURA AKITAKE (JP)
Application Number:
PCT/JP2018/034663
Publication Date:
April 04, 2019
Filing Date:
September 19, 2018
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
G01N1/02
Domestic Patent References:
| WO2012063796A1 | 2012-05-18 |
Foreign References:
| JP2015224991A | 2015-12-14 | |||
| JPS604937U | 1985-01-14 | |||
| CN204612991U | 2015-09-02 | |||
| JP2003524522A | 2003-08-19 | |||
| JPH09145568A | 1997-06-06 | |||
| DE19820174A1 | 1999-11-04 |
Attorney, Agent or Firm:
NAGAI Hiroshi et al. (JP)
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