SCANNING CONFOCAL MICROSCOPE AND ADJUSTMENT METHOD FOR SCANNING CONFOCAL MICROSCOPE

WIPO Patent Application WO/2022/145391

A1

This scanning confocal microscope comprises: a light source device which supplies illumination light; an objective optical system which focuses the illumination light on a subject; a scanning part which scans the subject with the focused illumination light; an image-forming optical system which focuses light produced from the subject by the focused illumination light; a detector which detects the focused light from the image-forming optical system; a stop part which forms an aperture that sets a light receiving region of the detector; an aperture control part which sets the size of the aperture of the stop part to a first region and a second region that is a larger aperture than the first region; a measurement control part which measures the relative position of the aperture of the second region and the focused light. The measurement control part performs movement control for moving the focused light relative to the edge of the aperture in the second region, detection control for causing the detector to detect a change in the intensity of light in the second region, and calculation control for calculating the relative position of focused light in the second region on the basis of the change in the intensity of the light.

SATO TATSUYA (JP)
TOMIZAWA SATSUKI (JP)
TAKEUCHI ATSUSHI (JP)
IKEDA SATOSHI (JP)

PCT/JP2021/048339

July 07, 2022

December 24, 2021

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NIKON CORP (JP)

G02B21/00; G01N21/64; G02B21/06

JP2015018104A	2015-01-29
JP2010019630A	2010-01-28

NISHIZAWA Kazuyoshi et al. (JP)

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